NiCrAlY薄膜应变计的研制  

Research and fabrication of NiCrAlY thin-film strain gauges

作　　者：张洁[1] 杨晓东[1] 蒋书文[1] 蒋洪川[1] 赵晓辉[1] 张万里[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《传感器与微系统》2015年第4期105-107,共3页Transducer and Microsystem Technologies

摘　　要：采用射频磁控溅射法在Ni基高温合金拉伸件上制备Ni Cr Al Y薄膜应变计。研究了热稳定处理对Ni Cr Al Y薄膜结构、表面形貌的影响,并且测试了Ni Cr Al Y薄膜应变计的电学与应变性能。结果表明：热稳定处理后Ni Cr Al Y薄膜应变计由于在表面形成了一层Al2O3膜,具有抗高温氧化的特性,在室温~800℃范围内,应变计电阻同温度呈线性变化,电阻温度系数（TCR）约为290×10^-6/℃,室温下的应变计系数（GF）为2.1。NiCrAlY thin film strain gauges are deposited on the nickel-based superalloy by radio-frequency magnetron sputtering. The effects of stabilized heat treatment at 1 000 ~C on structure and surface morphology of NiCrA1Y thin films are investigated and the electromechanical properties of NiCrA1Y thin film strain gauges are measured. After stabilized heat treatment at 1 000 ℃, a layer of AI20z is formed on the surface of NiCrA1Y thin film,which is important cause for excellent high-temperature oxidation resistance. The variation of strain gauge resistance with temperature is linear in the temperature range from room temperature to 800 ℃. The temperature coefficient of resistance （TCR） is about 290×10^-6/℃, and gauge factor （GF） is about 2. 1 at room temperature.

关 键 词：磁控溅射 NICRALY 薄膜应变计 应变计系数 电阻温度系数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]