红外线治疗仪中宽波段带通滤光片的研究  

Study and Fabrication of Broad Band-pass Filters in Infrared Therapy Apparatus

作　　者：刘冬梅[1] 刘爽[1] 付秀华[1] 张静[1] 何松霖[1] 

机构地区：[1]长春理工大学光电工程学院,长春130022

出　　处：《光子学报》2015年第3期1-6,共6页Acta Photonica Sinica

基　　金：红外技术预研项目(No.5131xxxx103)资助

摘　　要：研究了一种用于红外线治疗仪的新型滤光片.该滤光片通过对红外线治疗仪光源所发出的光进行选择性滤波,能够降低部分波段光的承载能量,提高治疗仪的安全使用性能.针对红外线治疗仪对滤光片的使用要求,选择Ti3O5和SiO2作为高低折射率材料,采用电子束加热蒸发方式,配合离子辅助淀积技术,利用石英晶控控制法对膜层厚度进行监控,通过反复优化各项工艺参量,制备出在600～1 200nm波段平均透过率高于92%,300～550nm、1 270～2 000nm波段平均透过率低于2%的宽波段带通滤光片.研究中运用“拆分技术要求”的设计思想,对颜色片进行双面镀制,解决了单面膜层过厚难以制备的问题,降低了制备难度,易于批量生产.测试结果表明,该滤光片满足使用要求.Design and manufacture of a new type of filters which meet the infrared therapy apparatus needs. By selectively filtering for the light of the infrared light emitted by the therapy apparatus, reducing the portion of the band light carrier energy, improving the safety performance of the therapy apparatus. Based on the use requirements of the filters to infrared therapy apparatus, chose Ti3Os and SiOz as high and low refractive index materials respectively. Thin films were prepared through electron beam evaporation method and ion-assisted deposition technique, and the thickness of the filter was controlled using crystal-controlled. By repeatedly optimizing technical parameters, the band-pass filter was prepared. The average transmittance of the filter is higher than 92% at the band of 600-1200nm, the average transmittance of the broad band-pass filter is less than 2% at the band of 300 -550nm and1270nm-2000nm. To solve the problem of the single sided film was too thick to prepared. Based on the concept of splitting technical requirements, the double-sided of the color filter were coated. The results show that the difficulty of preparation are reduced, and filters can be easily manufactured in a large scale, the filter meets the actual requirements.

关 键 词：带通滤光片 膜系设计 拆分技术要求 红外线治疗仪 电子束蒸发 离子辅助淀积技术 石英晶控控制法 

分 类 号：O484.4[理学—固体物理]