一种宽量程气压传感器的接口电路设计与测试标定  

The Design of the Interface Circuit for a Wide Range Barometric Pressure Sensor

作　　者：秦晓霞[1] 高艳[1] 余辉洋[1] 聂萌[1] 

机构地区：[1]东南大学电子科学与工程学院MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2015年第3期320-324,共5页Chinese Journal of Sensors and Actuators

基　　金：国家863项目(项目号:2012AA040502)

摘　　要：高空探测气压传感器,其特点是测量量程宽,满足常压到极低压(10 h Pa)测量,因此,专用型压阻式气压传感器输出信号检测与数模转换接口电路的设计,是推广高空探测气压传感器应用的关键技术之一,具有十分重要的现实意义和广阔的使用前景。本文针对宽量程检测特点设计了压阻式气压传感器专用接口电路,解决了传感器微小电阻变化量的检测问题,并对传感器性能进行测试分析与标定,可实现传感器全量程误差不超过2.6 h Pa,并实现数字化输出,完成传感器接口电路设计。The barometric pressure sensor for high altitude detection,is usually made to achieve to measuring wide range of air pressure from atmospheric pressure to ultra low pressure（10 hPa）. Therefore,a special interface circuit aimed to realize the output signal detection and analog to digital conversion,is very critical for the application of the barometer used in high altitude detection. In this paper,a new special circuit for piezoresistive pressure sensor is de-signed,which can successfully solve the problem of detecting the small change of resistance,and can be used in the detection of pressure within a wide pressure range. The performance of the pressure sensor is analyzed and calibrated. Besides,the digital output of sensor is realized,and the error is less than 2.6 hPa within the whole measurement range.

关 键 词：高空探测 气压传感器 性能测试 接口电路 数字化输出 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]