表面微机械MEMS温度传感器研究  

A Surface Micromachined MEMS Temperature Sensor

作　　者：刘庆海[1] 黄见秋[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2015年第3期325-329,共5页Chinese Journal of Sensors and Actuators

基　　金：国家863计划项目(2012AA040502)

摘　　要：提出一种基于表面微机械工艺的MEMS温度传感器,其基本原理是:由于材料热膨胀系数的差异,复合悬臂梁在热应力作用下发生弯曲,进而影响压阻单元中的应力分布,压阻变化通过惠斯登电桥读出,由电桥输出电压变化表征温度的变化。相比于其他温度传感器,这种微机械温度传感器的灵敏度高、尺寸小、精度高。针对提出的温度传感器结构,文中给出了传感器的设计原理、制备工艺以及信号检测电路的设计。经测试,传感器的灵敏度为9.2 m V/℃,具有良好的稳定性。Presented a surface micromachined MEMS temperature sensor. Its basic principle was：Composite cantile-ver beamsbent with thermal stresses induced by differences of thermal expansion coefficients. The stresses in thepie-zoresistors changed with the deformation of beams and a voltagewas output by the Wheatstone bridge to characterize the temperature. Compared with other temperature sensors,the piezoresistivemicromachined temperature sensors had advantages of higher sensitivity,smaller size and higher precision. The paper reported the design principle,fabrica-tion process and the signal conditioning circuitof the sensor. According to the test results,the sensitivity ofthe sensor is 9.2 mV/℃ and it presents excellent repeatability.

关 键 词：压阻效应 悬臂梁 表面微机械 温度传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]