差分电容硅微加速度计检测电路研究  被引量:5

Research of Detective Circuit for Differential Capacitive Silicon Micro Accelerometer

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作  者:王猛[1] 肖鹏[1] 徐林鹏[1] 王玉朝[1] 滕霖[1] 

机构地区:[1]中航工业西安飞行自动控制研究所,西安710065

出  处:《传感技术学报》2015年第3期347-351,共5页Chinese Journal of Sensors and Actuators

基  金:国际科技合作项目(2011DFA72370);惯性十二五预研项目

摘  要:针对硅微加速度计中微小差分电容检测,提出了一种基于调制解调方法的闭环检测电路,介绍了该闭环检测系统的原理框图和实现途径。分析了基于单路载波的前置电容-电压(C-V)转换电路,证明了基于相关芯片的解调方法的有效性,其解调效率仅对开环输出有影响;基于双路反馈电路的静电力平衡回路有效提高该检测系统的线性度。结合硅微加速度计参数和电路设计参数,对加速度计系统进行了仿真,仿真结果显示系统稳定,刻度系数为0.9 V/gn左右,带宽700 Hz左右。结合表头进行的精密转台实验结果表明该加速度计系统刻度系数0.88 V/gn,量程可达±13 gn。A close-loop detective circuit based on modulation and demodulation is introduced,for detection on micro differential capacitance of silicon micro accelerometer. The principal configuration and the approach are presented. A prepositioned capacitance-to-voltage circuit based on single carrier wave is analyzed,and the validity of the de-modulation approach which is based on correlative chip is proved. The electrostatic rebalance circuit based on feed-back circuits advances the linearity of the system. The Simulink model of the closed-loop system is established with the parameters of the silicon micro accelerometer and the circuits,the results show that the systems stable,and the scale factor is about 0.9 V/gn,with the bandwidth 700 Hz. The circuits presented in this paper are tested on a pre-cision roller with a differential MEMS accelerometer. The test results show that the scale factor of the system is 0.88 V/gn and the measuring range of the accelerometer is ±13 gn.

关 键 词:微加速度计 检测电路 差分电容 调制解调 

分 类 号:V241.5[航空宇航科学与技术—飞行器设计]

 

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