重力式芯片处理机温度控制技术研究  

The study of gravity chip handler's temperature control technology

作　　者：王志俊[1] 张吉月[1] 

机构地区：[1]北京石油化工学院,北京102617

出　　处：《工业仪表与自动化装置》2015年第2期36-38,48,共4页Industrial Instrumentation & Automation

摘　　要：重力式芯片处理机温度控制过程中,由于被控对象数学模型的不确定性,运用常规PID控制存在着调节时间长、易超调和超调后冷却时间长的问题。采用系统辨识的方法确定被控对象的传递函数,在此基础上,运用了一种分段PID的方法有效地抑制了温度的超调,并减小了调节时间。仿真和实验证明了该方法的有效性,能满足重力式芯片处理机的工艺要求,同时提高了生产效率。During the gravity chip handler＇s temperature of the controlled object＇ s mathematical model, there are some to control the temperature, such as long time to adjust, easy time. Utilizing controlling process, due to the uncertainty problems when using the conventional PID to overshoot and then need a long cooling a system identification method to determine the transfer function of the controlled object, and based on this, a sectional PID control scheme is used to inhibit the temperature overshoot phenome- non, to speed up the adjustment of the temperature control. The simulation and experimental results show the effectiveness of the method, it can meet the technological requirements of the gravity chip handier, and improve the productivity.

关 键 词：重力式芯片处理机 温度控制 分段PID 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]