溶胶-凝胶非硫化法制备铜锌锡硫薄膜（英文）  

Cu_2ZnSnS_4 films fabricated by a simple sol-gel process without sulfurization

作　　者：张克智[1] 何俊[1] 王伟君[1] 孙琳[1] 杨平雄[1] 褚君浩[1] 

机构地区：[1]华东师范大学电子工程系极化材料与器件教育部重点实验室,上海200241

出　　处：《红外与毫米波学报》2015年第2期129-133,共5页Journal of Infrared and Millimeter Waves

基　　金：Supported by National Natural Science Foundation of China(61106064);Science and Technology Commission of Shanghai Municipality Project(11ZR1411400,10JC1404600)

摘　　要：采用溶胶-凝胶非硫化方法制备了表面平整、致密的铜锌锡硫薄膜.XRD及Raman分析表明制备的铜锌锡硫薄膜为锌黄锡矿结构.能谱分析表明所有薄膜均贫铜富锌贫硫.场发射扫描电子显微镜测得薄膜的厚度在0.7μm左右.透射光谱表明随后退火温度的提高薄膜的光学带隙从2.13 eV减小到1.52 eV.Cu2ZnSnS4 （CZTS） films with a smooth and compact morphology were obtained via a sol-gel process. Raman spectra and X-ray diffraction （XRD） results indicate that all the films have the kesterite structure. Energy dispersive X-ray spectroscopy （EDS） suggests that all of CZTS films are of S-deficient, Cu-poor and Zn-rich states. The thickness of all the films is around 0.7 μm measured by a field emission scanning electron microscope （FE-SEM）. Transmission spectra reveal that the optical band gap （Eg） of samples reduces from 2.13 to 1.52 eV as post-annealing temperature goes up.

关 键 词：溶胶-凝胶 铜锌锡硫 薄膜 前驱体 预退火 后退火 组分 

分 类 号：TP914.4[自动化与计算机技术]