微气体传感器微热板的优化设计  

Optimizing Design of Micro-hotplate for Micro Gas Sensor

作　　者：刘丽丽[1] 何越[1] 刘震[1] 王连元[1] 刘丽[1] 苏畅[1] 薄小庆 张晓波[1] 

机构地区：[1]超硬材料国家重点实验室,吉林大学物理学院,吉林长春130012

出　　处：《仪表技术与传感器》2015年第4期13-14,20,共3页Instrument Technique and Sensor

基　　金：吉林省科技厅重点科技攻关项目(20140204027GX)

摘　　要：基于铂的热敏热阻特性和Si O2的绝热绝缘特性,设计了一种以铂作为电极材料,Si O2作为隔热层和绝缘层材料的微气体传感器的硅基微热板结构。利用有限元分析工具对微热板的基底和电极分别进行了设计和优化,并分析了微热板的热场和磁场分布。当基底设计为前Si O2层、中间Si层、后Si O2层3层结构且厚度分别为25μm、100μm、175μm,加热电极宽度为150μm时,微热板能够获得高且均匀的中心温度。该电极结构有助于消除磁场对测量信号的干扰,提高了传感器的整体性能。Due to the thermal resistant and sensitive characteristics of metal platinum, as well as the heat and electricity insu- lating characteristics of SiO2, a kind of the Si-substrated micro-hotplate structure was designed for micro gas sensor, in which plati- num was used as electrode material and SiO2 was used as thermal and electricity insulation layer material.The substrate and the heating electrode of the micro-hotplate were optimized by using finite element analysis tool, and the thermal field distribution and magnetic field distribution of the micro-hotplate were also analyzed.When the substrate was composed of three layers and the thick- ness of front SiO2 ,Si and rear SiO2 were 25 μm, 100 μm, 175 μm respectively and the heating electrode width was 150 μm,the mi- cro-hotplate can obtain high and uniform central temperature distribution.The electrode structure helps to eliminate the interference on the measurement signal from magnetic field,which is helpful to improve the whole performance of the sensor.

关 键 词：微热板 结构设计 温度分布 磁场分布 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]