电子气体净化器现状与趋势  

Current Status And Trend of Electronic Gas Purifiers

作　　者：叶向荣[1,2] 陈刚[1] 周黎旸 

机构地区：[1]浙江巨化股份有限公司,浙江衢州324004 [2]浙江师范大学先进催化材料教育部重点实验室,浙江321004

出　　处：《低温与特气》2015年第2期1-6,共6页Low Temperature and Specialty Gases

摘　　要：电子气体净化器是对电子气体进行在线净化,使主要杂质含量由10-6级降低到10-9、10-12级的关键纯化装置。与电子气体一样,同属我国亟待发展的战略资源与关键技术。从技术和市场角度,对电子气体净化器国内外现状和发展做总体性概括、介绍和展望。Purifier, a critical device for online purification of electronic gases, serves to bring down the concentration of im-purities from 10 ^-6 to 10^ -9 or 10 ^-12 level,thus being a strategic resource and key technology to be developed in our country along with electronic gases.From the technical and marketing points, this review gives a brief summary and outlooks on home and abroad status as well as trend of such unique devices.

关 键 词：净化器 电子气体 在线净化 净化材料 痕量杂质 

分 类 号：TQ116[化学工程—无机化工]