基于压电偏转镜的激光扫描系统设计  

Design of laser scanning system based on Piezoelectric deflecting mirror

作　　者：李永锋[1] 王诚[1] 穆让修 李军芳[1] 刘晓英[1] 

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《电子设计工程》2015年第9期138-141,共4页Electronic Design Engineering

摘　　要：相比其他诸如音圈和检流计之类的驱动器,压电陶瓷驱动的偏转台和扫描镜具有更快的加速度和更高的带宽,采用位移传感器的闭环系统具有很高的定位精度。针对扫描范围±1 mrad,分辨率几个μrad的激光扫描系统技术要求,提出了以压电陶瓷驱动的偏转镜为核心部件的扫描系统。该系统采用两通道16位D/A,经过数模转换后送功率放大器放大后控制摆镜偏转,系统采用了电阻应变片位移传感器的闭环控制,提高了定位精度。测试表明采用压电陶瓷驱动的偏摆镜分辨率达到0.4μrad,线性度达到4μrad,重复定位精度达到1μrad,完全满足扫描系统的要求。Compared to other actuator like a voice coil or a galvanometer, the deflection platform and scan mirror driven by Piezoelectric Ceramics own faster acceleration and higher bandwidth, and the closed-loop system with displacement sensor has high positioning accuracy. In order to fulfill the technical demands of laser scanning system of the scanning range ＋lmrad and the resolution several μrad, the deflection mirror, driven by Piezoelectric Ceramics, is used as the core component of the scanning system. According to the amplified signal of power amplifier, which gets from a two-channel 16-bit D/A conversion, the system control oscillating mirror to deflect. And by adopting closed-loop control of resistive strain gauge displacement sensor, it can improve position accuracy. The test shows that the system＇s resolution reach 0.4 μrad, linearity 4μrad, repeat positioning accuracy lurad by using the deflection mirror of piezo-ceramic actuator ,which totally satisfy the demands of scanning system.

关 键 词：激光扫描 压电陶瓷 压电偏转镜 压电陶瓷驱动器 

分 类 号：TN2[电子电信—物理电子学]