基于MEMS电容加速度计的声矢量传感器小型化设计  

Miniaturization design of an acoustic vector sensor based on MEMS capacitive accelerometer

作　　者：周宏坤[1,2] 洪连进[1,2] 

机构地区：[1]哈尔滨工程大学水声技术重点实验室,哈尔滨150001 [2]哈尔滨工程大学水声工程学院,哈尔滨150001

出　　处：《中国惯性技术学报》2015年第2期270-274,共5页Journal of Chinese Inertial Technology

基　　金：长江学者和创新团队发展计划资助项目(IRT1228)

摘　　要：针对传统压电型声矢量传感器无法兼顾小体积与高灵敏度的问题,利用MEMS电容加速度计作为拾振器,实现矢量传感器的小型化设计。首先采用机电类比分析的方法得到内置加速度计的刚硬球体的声致振动响应;然后进行硅微电容加速度计选型和参数分析、设定,并设计制作了一只二维球形矢量传感器样机;最后对样机进行了参数测试,结果表明两矢量通道均具有良好的方向性,声压灵敏度分别为?185 d B和-186 d B(1 k Hz,0 d B ref 1 V/μPa),通道间相位差与理论值保持一致,验证了利用MEMS电容加速度计设计矢量传感器的可行性。To overcome the conflict between small size and high sensitivity in conventional piezoelectric acoustic vector sensors, a MEMS capacitive accelerometer is utilized as the pickup to achieve the miniaturi- zation requirement. Firstly, the acoustically induced vibrating response of rigid sphere in the sensor＇s built-in accelerometer is achieved by an electromechanical analogy approach. Then the type selection, parameters analysis and setting of the silicon capacitive micro-accelerometer are implemented, and a biaxial spherical vector sensor prototype is designed and fabricated. Finally, the experiments are performed on the vector sen- sor, which indicate that the two acoustic vector channels possess faithful cosine directivity, and the pressure sensitivities are -185 dB and -186 dB （1 kHz, 0 dB ref 1 V/μPa） respectively, and the phase difference be- tween the two channels is identical to the theoretical value. The experiments verify the feasibility of the pro- posed acoustic vector sensor with MEMS capacitive accelerometer.

关 键 词：MEMS电容加速度计 声矢量传感器 小型化设计 机电类比 

分 类 号：TB565.1[交通运输工程—水声工程]