透明导电氧化物薄膜的湿热衰减特性研究  

STUDY ON DAMP HEAT DEGRADATION OF TRANSPARRENT CONDUCTIVE OXIDE FILMS

作　　者：王新巧[1] 朱红兵[1] 陈静伟[1] 李明[1] 王辉[1] 傅广生[1] 麦耀华[1] 

机构地区：[1]河北大学物理科学与技术学院,保定071002

出　　处：《太阳能学报》2015年第5期1149-1155,共7页Acta Energiae Solaris Sinica

摘　　要：将制备的3种透明导电氧化物（TCO）薄膜材料，即掺铝氧化锌（ZnO：A1，AZO）、掺硼氧化锌（ZnO：B，BZO）和掺氟氧化锡（SnO：FTO）薄膜进行温度为85℃和相对湿度为85％的湿热实验并进行退火，研究其光学和电学性质衰减特性以及恢复情况。研究表明：湿热实验和经过后续热处理的3种TCO薄膜的表面形貌基本不变；AZO和FTO薄膜光学和电学性能都相对稳定；但BZO薄膜的迁移率则是在湿热实验20h内由初始的19cm2／Vs迅速下降到1．99cm2／Vs，而BZO薄膜载流子浓度是在湿热处理327h由初始值7．2×1019/cm3迅速下降到8．8×1018／cm3，载流子浓度的降低导致薄膜在800-2200nm波长范围内的光吸收减少；通过对晶粒间迁移率和晶界处迁移率分析得到BZO薄膜的迁移率衰退主要与水分子侵入薄膜内部并被吸附在晶界处；适当的热处理可使BZO薄膜的电学性能得到恢复。Three different types of transparent conductive oxide （TCO）, aluminum-doped zinc oxide （AZO）, boron- doped zinc oxide （BZO）and fluorine-doped tin oxide （FTO） films are studied before and after damp heat treatment （DH treatment） in an environment at 85 ℃ with a relative humidity of 85%, subsequent vacuum annealing at the temperature of 250 ℃ in nitrogen atmosphere is applied to investigate the recovery properties to TCO films. It is found that the surface morphologies of three TCO films don!t change through the DH exposure and annealing. The optical and electrical properties of AZO and FTO films keep＇ relative stable after DH and annealing treatment. However, the mobility of BZO films decrease rapidly and carrier concentration decline slowly through the DH treatment. Carrier concentration of BZO films sharply decreased from 7.2×1019/cm3 to 8.8× 1018/cm3 in 327 DH treatment, while the mobility declined at the damp heat test can be recovered after proper thermal annealing.

关 键 词：透明导电氧化物(TCO)薄膜 湿热处理 退火 晶界迁移率 晶粒内迁移率 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术]