真空镀膜机比较片机构性能和强度的优化设计  

Research of comparison sheet institution performance and intensity optimization design for vacuum coating machine

作　　者：刘旸[1] 杨峰[1] 王彩霞 

机构地区：[1]河南工业职业技术学院,河南南阳473000 [2]河南中光学集团有限公司,河南南阳473000

出　　处：《真空》2015年第3期15-17,共3页Vacuum

基　　金：自动蒸镀真空镀膜机(ZS1500)产业化技术开发(河南省科工经(2007)883号文)

摘　　要：分析现有光学真空镀膜机比较片机构在使用过程中存在的问题。根据现代光学真空镀膜机的发展趋势和实际生产中急需解决的问题,通过多方面的研究分析,优化设计新一代的镀膜机比较片结构,解决影响光学薄膜质量和超多层精密光学薄膜镀制的问题,以提高薄膜的监控精度,实现系统的自动控制,提高光学真空镀膜机生产效率,降低生产成本。使现代光学真空镀膜机的结构配置及使用效果达到最佳。The existing problems for the comparison piece institution of the optical vacuum coating machine were analyzed in this paper. Combined with the development trend of modern optical vacuum coating machine and the urgent problems in practical production, a new coating machine comparison piece structure were designed, which can solve the plating problem of the optical thin films. The design not only can improve the monitoring precision of the thin film and realize the automatic control, but also can improve the coating efficiency and reduce production cost. It can also make the structure configuration and use of the modern optical vacuum coating machine the best.

关 键 词：比较片 光学薄膜 比较片机构 真空镀膜机 

分 类 号：TB43[一般工业技术]