基于激光干涉测振技术的压电陶瓷蜂鸣片质量监控  

Quality Control of the Piezoelectric Ceramic Buzzer Based on Laser Interferometer Vibration Measurement Technique

作　　者：赵斌兴[1] 王亚非[1] 高椿明[1] 孙启明[1] 

机构地区：[1]电子科技大学光电信息学院,成都610054

出　　处：《电子科技大学学报》2015年第3期451-455,共5页Journal of University of Electronic Science and Technology of China

基　　金：中央高校基本科研业务费专项资金(ZYGX2012Z006;E022050205);国家自然科学基金(50506006;61379013;61107078);四川省青年基金人才培养计划(2011JQ0025)

摘　　要：利用激光干涉技术和干涉条纹大小数拟合计数软件处理方法,研究测量低频微小振动,开展压电陶瓷蜂鸣片质量监控研究。介绍了基于激光干涉技术的振动测量研究方法,分析了压电陶瓷蜂鸣片在正弦电压驱动下,不同初始干涉光程差、不同振幅的振动产生的干涉信号及干涉条纹大小数拟合计数软件处理方法;建立了迈克尔逊干涉测振系统,运用干涉条纹大小数拟合计数软件方法,对不同正弦电压驱动的压电陶瓷蜂鸣片微小振动进行了测量。研究表明,基于大小数拟合计数软件方法的激光干涉测振技术可以有效测量微小振动,为压电陶瓷蜂鸣片质量监控提供一种有效手段。Laser interferometer, which uses interferometric fringes integral counting and decimal fitting software method to extract the vibration displacement, was employed to measure low-frequency micro-vibrations of piezoelectric ceramic buzzers. The vibration measurement principle on the base of laser interference technique is introduced at the first. Interference signals with various initial optical path differences and vibration amplitudes when the piezoelectric ceramic buzzers are driven by sinusoidal voltage signals are analyzed. The corresponding software processing method for the vibration displacement determination is established. An experimental system was built for the measurement of micro-vibrations of a piezoelectric ceramic buzzer driven by different sinusoidal voltage signals. The results show that the laser interferometer vibration measurement technique based on the interferometric fringes integral counting and decimal fitting software method can efficiently measure micro-vibrations and provide an effective means for quality control of piezoelectric ceramic buzzers.

关 键 词：拟合计数 激光干涉 压电陶瓷蜂鸣片 振动测量 

分 类 号：O436[机械工程—光学工程]