退火温度对DLC膜热稳定性及摩擦学性能的影响  

Influence of Annealing Temperature on Thermal Stability and Tribological Properties of Diamond-Like Carbon Coatings

作　　者：曾群锋[1] 刘官[1,2] 彭润玲[2] 董光能[1] 徐飞燕[2] 

机构地区：[1]西安交通大学现代设计及转子轴承系统教育部重点实验室,西安710049 [2]西安工业大学机电工程学院,西安710021

出　　处：《真空科学与技术学报》2015年第5期601-607,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(51305331);教育部博士点基金项目(20120201120040);陕西省工业科技攻关计划项目(2013K09-20);中央高校基本科研业务费资助课题

摘　　要：采用非平衡磁控溅射技术分别在氮化硅陶瓷球和高速工具钢圆盘表面制备了类金刚石(DLC)膜。使用箱式电阻炉对DLC膜在大气环境中进行高温退火处理以研究环境温度对DLC膜摩擦学性能的影响;并分别采用激光拉曼光谱仪和球-盘式摩擦磨损试验机对退火处理前后DLC膜的结构和摩擦学性能进行了研究。采用金相显微镜观察了摩擦副磨损表面的形貌。研究发现,随着退火温度的升高,DLC膜中sp3杂化键向sp2杂化键的转化加快,当退火温度为600℃时,DLC膜发生严重的石墨化。而当退火温度为400℃时,DLC膜的摩擦系数及磨损率最小。拉曼测试表明400℃退火处理后DLC膜表层含有Si及SiO2,在摩擦过程中形成了含SiC的转移膜,使得DLC膜的摩擦系数明显降低,磨损减小。研究结果表明,退火处理对DLC膜的热稳定性和摩擦学性能有重要的影响。The diamond-like carbon（DLC）thin films,deposited on substrates of SiC balls and high speed steel discs by unbalanced magnetron sputtering,were annealed in ambient environment.The impact of the annealing temperature on the microstructures,thermal stability and tribological behavior of the DLC coatings was investigated with metallographic microscope,Raman spectroscopy,and conventional mechanical probes.The results show that the annealing temperature significantly affects the microstructures,thermal stability and tribological property of the DLC coatings.To be specific,as the annealing temperature increased,the sp3-C bond rapidly turned into sp2-C bond,and the friction coefficient and wear-rate changed in an increase-decrease mode,being the lowest at 400 oC.Annealed at 600℃,a significant diamond-to-graphite transition occurred.In the wear tracks,the SiC scraps observed in the wear tracks possibly account for the reduction of both the friction coefficient and wear rate.

关 键 词：类金刚石膜 退火温度 摩擦学性能 RAMAN光谱 

分 类 号：TH117.1[机械工程—机械设计及理论]