基于像素偏振片阵列的实时动态相位测量技术  被引量:3

Real-time dynamic phase measurement based on pixelated micropolarizer array

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作  者:张志刚[1] 董凤良[2] 程腾[1] 仇康[1] 张青川[1] 褚卫国[2] 伍小平[1] 

机构地区:[1]中国科学技术大学近代力学系,中国科学院材料力学行为与设计重点实验室,合肥230027 [2]国家纳米科学中心纳米加工技术实验室,北京100190

出  处:《中国科学:技术科学》2015年第5期491-497,共7页Scientia Sinica(Technologica)

基  金:国家重点基础研究发展计划(编号:2011CB302105);国家自然科学基金(批准号:11332010,11102201,11127201,11472266,11372300);中国科学院科研装备研制项目(编号:YZ201265)资助

摘  要:基于像素偏振片阵列的实时相移干涉计量技术可以实现实时相位测量,并降低干涉计量实验中的防振要求.本文采用电子束曝光技术制备了单元间距为7.4?m,像素数为320×240的基于铝纳米光栅的像素偏振片阵列.铝纳米光栅周期为140 nm,每相邻2×2单元的透偏振方向分别为0°,45°,90°,和135°.将像素偏振片阵列集成到感光元件上,并将其应用于实时相移干涉计量.采用线性插值的方法由采集的单帧图像获得4幅不同相移量时的干涉条纹图,从而解得物光波的位相信息.采用上述装置成功测量了由温度变化引起的相位动态变化,证实了该方法在实时动态相位测量应用的可行性.Real-time phase-shifting interferometry based on pixelated micropolarizer array (PMA) has recently been used to achieve real-time phase measurement, and the requirement of vibration resistance is greatly reduced. In this paper, a 320~240 Aluminum PMA with 7.4μ m pitch is successfully fabricated by the electron beam lithography (EBL). The period of the grating is 140nm, and the polarization directions of each 2×2 units are 0% 45°, 90v, and 135°. The PMA is integrated to the CCD sensor to achieve real-time phase measurement. Four fringe patterns of different polarization directions are obtained from only one single frame image by linear interpolation method, and then the object wave phase is calculated in real-time. Moreover, dynamic phase caused by temperature change is obtained in real-time, which verify the feasibility of this method in real-time dynamic phase measurement.

关 键 词:像素偏振片阵列 实时相移 纳米光栅 电子束曝光 

分 类 号:O436.1[机械工程—光学工程]

 

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