Cr/WC/DLC薄膜的多环境摩擦学性能  

Tribological Properties of Cr/WC/DLC Film in Multiple Environments

作　　者：王佳凡[1,2,3] 陈克选[1] 王永欣 吴昊[1] 李金龙 叶育伟 

机构地区：[1]兰州理工大学材料科学与工程学院,兰州730050 [2]中国科学院宁波材料技术与工程研究所中国科学院海洋新材料与应用技术重点实验室,浙江宁波315201 [3]中国科学院宁波材料技术与工程研究所浙江省海洋新材料与应用技术重点实验室,浙江宁波315201

出　　处：《中国表面工程》2015年第3期49-55,共7页China Surface Engineering

基　　金：国家重点基础研究发展计划(973计划)(2013CB632302);国家自然科学基金(51202261)

摘　　要：采用磁控溅射法,在304不锈钢上制备Cr/WC/DLC多层梯度过渡类金刚石薄膜,利用场发射扫描电子显微镜(SEM)、拉曼光谱仪(Raman)、纳米压痕仪、划痕测试仪等分析薄膜的微观结构和力学性能,利用UMT-3多功能摩擦磨损试验机考察其在大气、去离子水、发动机油3种环境下的摩擦学性能。结果表明:该薄膜的多层梯度设计使其膜基间结合力得到了有效改善,且硬度高达32.6GPa,在3种环境下均具有优异的摩擦学性能。在大气环境下,薄膜具有较低的平均摩擦因数,为0.094;但具有3种环境下最大的磨损率,为7.86×10-8 mm3(N·m)-1;在去离子水环境下,薄膜的平均摩擦因数较高,为0.124;而其磨损率较低,为5.26×10-8 mm3(N·m)-1;在发动机油环境下,固-油复合润滑效应使薄膜具有更加优异的摩擦学性能,其平均摩擦因数和磨损率均为3种环境下的最小值,分别为0.065和4.44×10-8 mm3(N·m)-1。Multilayer gradient diamondlike carbon （Cr/WC/DLC） film was successfully fabricated on 304 stainless steel substrate by using magnetron sputtering technique. Microstructure and mechanical properties of the Cr/WC/DLC film were characterized by SEM, Raman spectroscopy, nanoindentor and scratch tester. Tribological performances of the Cr/WC/DLC film were investigated by UMT3 multifunctional tribometer in the atmosphere, distilled water and engine oil. The results show that： the design of multilayer gradient transition of the Cr/WC/DLC film makes the hardness of the film amount to 32.6 GPa, and significantly improves the bonding force between the film and the substrate, and its tribological properties are excellent under the three environments. In the atmosphere, the film shows a lower average friction coefficient and leds to the greatest wear rate , which are 0.094 and 7.86×10^-8 mm^3（N·m）^-1. In the water, the film has a higher average friction coefficient of 0.124, and has a lower wear rate of 5.26×10^-8 mm^3（N·m）^-1. In the engine oil, the film has the minimum average friction coefficient and wear rate, which are 0.065 and 4.44×10^-8 mm^3（N·m）^-1 , respectively.

关 键 词：磁控溅射 DLC膜 多层梯度薄膜 摩擦学性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TG115.58[金属学及工艺—金属学]