原子力显微镜实验的教学研究  

Experimental teaching study of different kinds of samples by atomic force microscopy

作　　者：王中平[1] 谢宁[1] 张宪峰[1] 张增明[1] 孙腊珍[1] 

机构地区：[1]中国科学技术大学物理学院物理实验教学中心,安徽合肥230026

出　　处：《物理实验》2015年第5期24-29,共6页Physics Experimentation

基　　金：中国科学技术大学教学研究项目(No.2014jxxm009)

摘　　要：利用磁控溅射法在硅衬底沉积金属铝作为光学薄膜样品、硅衬底表面制备单分散的国家标准物质以及DNA分散在云母片表面的生物样品,作为不同组的学生进行实验的研究样品,在室温下以不同型号原子力显微镜的轻敲模式进行样品的图像扫描,然后不同组的同学对实验结果进行比较讨论,学习掌握原子力显微镜的表征内容.实验结合了近代的样品制备技术、标准化的知识以及生物样品的制备方法和现代化的表征测试手段,适合本科生的研究型实验教学.Abstract： Students in different groups performed the experiments of atomic force microscopy u- sing different kinds Of samples, including metal or metal oxide thin films deposited on silicon sub- strates by magnetron sputtering, reference materials dispersed on silicon substrates, DNA or biologi- cal material dispersions on mica surface, etc. The different groups obtained different types of sample images by atomic force microscopy at room temperature in tapping or contact mode, and then they compared the experimental results and discussed with each other, leading to comprehensive study and mastering of atomic force microscopy. The experiment combined modern sample preparation methods, standardization knowledge and modern testing technology, its contents were reasonably arranged, ad- vanced, and suitable for undergraduate research-oriented experiments.

关 键 词：原子力显微镜 标准样品 金属薄膜 DNA 

分 类 号：TH742[机械工程—光学工程]