测量不确定度在干涉面形检测领域的研究现状及进展  

Research Status and Progress of Measurement Uncertainty in Interferometric Testing of Surface Figure

作　　者：全海洋[1,2] 侯溪[1] 伍凡[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2015年第6期26-36,共11页Laser & Optoelectronics Progress

摘　　要：评定测量不确定度是改进面形检测实验室质量的有效途径。为了促进测量不确定度在干涉面形检测领域的普及和应用,综述了近年来国内外在干涉面形检测领域中测量不确定度评估方法的研究现状和最新进展。介绍了量值溯源和测量不确定度的发展及研究现状,主要介绍了自下而上方法(即建模方法)评估测量不确定度和自上而下方法评估测量不确定度,重点阐述了干涉面形测量中的不确定度评估方法研究现状及进展。展望了现代干涉面形检测中不确定度评估的发展方向。Estimating uncertainty of measurement is an effective route to improve quality of surface figure testing in laboratories. To promote the popularization and application of measurement uncertainty in the field of interferometric surface figure testing, the latest progress of uncertainty evaluation in figure measurements is reviewed. The associated international standards of metrological traceability and uncertainty are introduced. Evaluating measurement uncertainty with the bottom-up approach （i.e. modelling approach） and top-down approach is mainly introduced. The progress and development of uncertainty evaluation are focused on in interferometric surface figure measurements. The development direction and further development of uncertainty evaluation method in interferometric surface figure measurements are prospected.

关 键 词：测量 测量不确定度 干涉测量 表面面形测量 溯源性 

分 类 号：O436[机械工程—光学工程]