Nd:YAG晶体板条低透射波前误差加工技术  

Low transmitted wavefront error processing technology for Nd:YAG crystal slab

作　　者：赵世杰[1] 谢瑞清[1] 廖德锋[1] 陈贤华[1] 王健[1] 

机构地区：[1]成都精密光学工程研究中心,成都610041

出　　处：《强激光与粒子束》2015年第6期171-176,共6页High Power Laser and Particle Beams

基　　金：中国工程物理研究院超精密加工技术重点实验室自主基金重大项目(ZZ13003)

摘　　要：针对高平均功率固体激光器对Nd:YAG晶体板条的技术需求,进行了Nd:YAG晶体板条低透射波前误差加工技术研究。详细分析了光学加工过程中引起板条端面透射波前畸变的误差来源,并提出工艺技术解决方案。实验结果表明,在板条抛光阶段通过采用合成盘硬抛光工艺以及新的工件装夹技术,能够解决传统板条加工工艺在面形及楔角精度方面可控性差的问题,更容易实现Nd:YAG晶体板条的低透射波前误差加工。对于150mm×30mm×2.5mm规格的Nd:YAG晶体板条元件,端面透射波前畸变PV值达到0.74λ。The transmitted wave front aberration is the key factor which restricts the further development of high average power solid-state lasers. This work analyses the error source of transmitted wave front for end surface, and a scheme of slab pro- cessing is purposed according to technology requirement of Nd..YAG crystal slab for high average power solid-state lasers. With the new type complex pad, fixture of slab and new polishing process, the problem of poor controllability of surface figure and wedge angle in continuous polishing has been solved. The processing results show that the PV of end surface transmitted wave- front aberration reached 0.74A for 150 mm ×30 mm×2.5 mm specification Nd：YAG crystal slab. The processing precision satis- fies the application requirement of high average power solid-state lasers.

关 键 词：ND:YAG晶体 板条 透射波前 光学加工 抛光 

分 类 号：TQ171.73[化学工程—玻璃工业]