36°YX-LiTaO_3/SiO_2结构Love波气体传感器研究  

Research on Love Wave Gas Sensor Based on 36°YX-LiTaO_3/SiO_2

作　　者：陈桂[1] 王文[1] 谢晓[1] 何世堂[1] 

机构地区：[1]中国科学院声学研究所声场声信息国家重点实验室,北京100190

出　　处：《压电与声光》2015年第3期377-379,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(11074268;11274340)

摘　　要：该文研究了一种覆盖六氟-2-羟基异丙基聚硅氧烷(SXFA)敏感膜,并针对有机磷化学物检测的新型Love波传感器,采用36°YX-LiTaO3与SiO2分别作为Love波延迟线器件的压电基底与波导层材料。将所研制的Love波器件作为差分振荡器的频率控制单元,结合SXFA敏感膜,开展了针对甲基磷酸二甲(DMMP)的气体传感实验,分析了不同波导层膜厚对Love波传感器气体响应的影响,并与传统瑞利型声表面波模式的气体传感器性能进行了对比,实验结果显示,Love波模式传感器表现出高灵敏度特性。The Love wave based gas sensor aimed at detection of organic phosphorus compounds was re- searched. The sensor was coated with fluoroalcoholpolysiloxane （SXFA） as the sensing material. 36°YX-LiTaO3/ and SiO2 were chosen as the materials for piezoelectric substrate and waveguide layer respectively. The developed Love wave devices was used as the feedback elements of a differential oscillator, combined with SXFA as the sensing material, a Love wave gas sensor experiment was performed for dimethylmethylphosphonate （DMMP） detection. The effect of the SiO2 thickness on gas response was analyzed. The experimental result indicates the Love wave gas sensor exhibit higher sensitivity over typical surface acoustic wave （SAW） gas sensor.

关 键 词：LOVE波 SIO2 灵敏度特性 36°YX-LiTaO3 

分 类 号：TN814[电子电信—信息与通信工程] TB212.2[一般工业技术—工程设计测绘]