高低结的真空制备及霍尔效应的快速测量  

Preparation of High-low Junction in a Vacuum System and a Rapid Measurement of the Hall Effect

作　　者：苏大生[1,2] 黄锦霞[1,2] 张治国[1,2] 

机构地区：[1]泉州师范学院功能材料研究所,福建泉州362000 [2]泉州师范学院物理与信息工程学院,福建泉州362000

出　　处：《泉州师范学院学报》2015年第2期84-88,共5页Journal of Quanzhou Normal University

基　　金：福建省高校服务海西建设重点项目(A100)

摘　　要：针对MD-450C型的真空镀膜机不能完成浅PN结的后期工艺处理问题,文章介绍了真空镀膜机的改造以及利用改造后的设备进行高低结的真空制备.通过对四电极霍尔效应样品的桥式等效电路的讨论,得出了浅PN结两侧导电类型同时测量的快速方法.Since MD-450C type vacuum coating machine can not complete post-treatment process issues of shallow PN junction, the study described the transformation of vacuum coating machine and used it for the preparation of high-low junction in a vacuum system.Through the discussion of four- electrode bridge equivalent circuit of Hall effect samples, a rapid method was obtained for simultaneously measuring conductivity type on both sides in a shallow PN junction.

关 键 词：高低结 真空制备 霍尔效应 快速测量 

分 类 号：O475[理学—半导体物理]