Research on the Key Technology of LTCC Pressure Sensor  

作　　者：Xiaoyan DAI Yukun YUAN Tanyong WEI Qiulin TAN 

机构地区：[1]College of Instruments and Electronic, North University of China, Taiyuan, 030051, China [2]Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan, 030051,China [3]National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan, 030051, China

出　　处：《Photonic Sensors》2015年第3期211-216,共6页光子传感器（英文版）

摘　　要：This article introduces the fabrication technology processes of the capacitive pressure sensor based on the low temperature co-fired ceramic （LTCC） material. Filling the cavity with different materials as a sacrificial layer is mainly discussed, and two different materials are chosen in the fabrication. It is found that the cavity filled with polyimide expands largely during sintering, while carbon ESL49000 material filled is more preferable to keep the cavity flat. Finally, the structure leaving without an air evacuation channel is designed and tested in a built-up pressure environment, the frequency measured decreases approximately linearly with the pressure applied, which proves the design leaving no air evacuation channel advisable.This article introduces the fabrication technology processes of the capacitive pressure sensor based on the low temperature co-fired ceramic （LTCC） material. Filling the cavity with different materials as a sacrificial layer is mainly discussed, and two different materials are chosen in the fabrication. It is found that the cavity filled with polyimide expands largely during sintering, while carbon ESL49000 material filled is more preferable to keep the cavity flat. Finally, the structure leaving without an air evacuation channel is designed and tested in a built-up pressure environment, the frequency measured decreases approximately linearly with the pressure applied, which proves the design leaving no air evacuation channel advisable.

关 键 词：LTCC sacrifice layer capacitive cavity passive wireless wireless detection 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置] TN405[自动化与计算机技术—控制科学与工程]