金刚石刀具的圆柱母光栅微加工基础研究  

Fundamental Research on Cyclindrical Grating Template Micromachining with Diamond Cutting Tool

作　　者：兀伟[1,2] 陈津平[1,2] 徐宗伟[1,2] 刘婷[1,2] 曹克雄 李万里[1,2] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]天津市微纳制造技术工程中心,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2015年第5期455-462,共8页Journal of Tianjin University：Science and Technology

基　　金：国家重点基础研究发展计划(973计划)资助项目(2011CB706700);国家自然科学基金资助项目(51275559;50935001);中物院超精密加工技术重点实验室开放基金资助项目(KF13008)

摘　　要：精密长光栅作为高档数控机床中的核心部件,其制造能力和精度直接影响着数控机床的制造水平.针对纳米滚压印技术制备长光栅中的核心部件即圆柱母光栅的制造开展了深入研究,探讨了母光栅刻划用金刚石刀具的聚焦离子束(FIB)制备技术,以及微刻划过程中切削参数对圆柱母光栅加工质量的影响规律.研究发现,聚焦离子束加工单晶金刚石材料时会存在沟道效应,影响所制备的金刚石刀具及其加工母光栅的形状精度.从改善离子束束流分布的均匀性、FIB加工参数优化等角度建立了有效克服FIB加工沟道效应的方法.通过DEFORM有限元模拟实验和超精密母光栅刻划实验,优化金刚石刀具刀尖角和微刻划加工速度,研究了抑制母光栅加工中微尺度毛刺的有效方法,最终获得了高精度母光栅刻划结果.Large-scale micro-pitch grating is the core device of high precision computer numerical control （CNC） machine tools, and its manufacture capacity and accuracy directly affects the level of manufactured CNC machine tools. In this paper, the basic research was conducted for manufacturing the cylindrical grating template which is the core device in roller nanoimprint technology. The key process in the fabrication of micro diamond tools with focused ion beam （FIB） and the impacts of chosen parameters in ultra-precision machining on the quality of cylindrical grating template were studied. It is found that the anisotropy of diamond material would cause channeling effect which would degrade the shape precision of both diamond tools and the template. In order to conquer the ion channeling effect, the methods for improving the ion beam homogeneity and optimizing the parameters in FIB fabrication were studied in detail. By DEFORM finite element modeling simulation and ultra-precision machining experiments, high precision cylindrical grating template without micro-burr was achieved by optimizing the tip angle of diamond tools and machining speed.

关 键 词：微纳制造 聚焦离子束 微刻划 金刚石刀具 沟道效应 

分 类 号：TG51[金属学及工艺—金属切削加工及机床] TG63