磷酸锂陶瓷靶材的制备  

Preparation of Li_3PO_4 Ceramic Targets

作　　者：皮陈炳 蔡雪贤 高庆庆[1] 张忠健[2] 肖超 尚福亮[1] 杨海涛[1] 

机构地区：[1]深圳大学材料学院,深圳市特种功能材料重点实验室,深圳陶瓷制备先进技术工程实验室,广东深圳518060 [2]株洲硬质合金集团有限公司,硬质合金国家重点实验室,湖南株洲412000

出　　处：《陶瓷学报》2015年第3期256-259,共4页Journal of Ceramics

基　　金：深圳市战略性新兴产业发展专项资金项目(编号:ZDSY20120612094418467);深圳市科技研发资金基础研究计划资助项目(编号:JCYJ20140418181958489)

摘　　要：采用传统的常压固相烧结方法制备了Li3PO4陶瓷靶材,研究了烧结温度对Li3PO4陶瓷靶材的微观结构力学性能、致密度的影响。通过XRD测定靶材相的结构,SEM观察靶材的断面形貌,万能实验机测量靶材的抗弯强度,维氏显微硬度仪测量靶材的维氏硬度,阿基米德排水法测量靶材密度等对Li3PO4靶材的性能进行了分析表征。结果表明:其各项力学性能均达到了一个很高的水平,靶材的最佳烧结温度为800℃,抗弯强度为76.16 Mpa,维氏硬度为475.87HV0.3,相对密度为98.89%;而XRD数据则表明靶材物相单一且结晶性良好。Li3PO4 ceramic targets were prepared by traditional solid-state sintering method. The effects of the sintering temperature on the microstructure, the mechanical properties and the density were discussed. The phase structure of the as-prepared targets was analyzed by X-ray diffractometer. The fracture morphology was observed by SEM. The bending strength was measured by the universal testing machine and the Vickers hardness was measured by the Vickers microhardness instrument. The density was measured using the Archimedes drainage method. The results show that the optimal sintering temperature is 800℃, resulting in a bending strength of 76.16 MPa, a Vickers hardness of 475.87HV0.3 and a relative density of 98.89%, which are excellent for a ceramic target material. XRD results indicated the sintered target having a good crystallinity.

关 键 词：粉末冶金 材料加工 磷酸锂 陶瓷靶材 烧结 电解质薄膜 Li3PO4 

分 类 号：TQ174.75[化学工程—陶瓷工业]