氮氧化硅/聚合物混合集成低功耗可变光衰减器  

Low Power Variable Optical Attenuator Utilizing Hybrid Integrated SiON/Polymer Channel Waveguide Platform

作　　者：宋倩倩[1] 雷建平 陈开鑫[1] 

机构地区：[1]电子科技大学通信与信息工程学院 [2]四川省宜宾市61902部队

出　　处：《光子学报》2015年第6期70-75,共6页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61177054)资助

摘　　要：利用具有相反热光特性的氮氧化硅与聚合物材料，采用混合集成波导结构设计了一种低功耗S型可变光衰减器．该衰减器以聚合物为芯层材料，氮氧化硅为包层材料，在弯曲波导上方制作加热电极从而通过热光效应来实现可调谐的衰减功能．理论分析表明，对于1．55／xm的工作波长，衰减器实现50dB的衰减仅需要3．6mW的功率．实验结果可实现0～40dB的衰减范围，相应的最大温度变化为70．4℃，器件插入损耗为5．4dB．By utilizing the opposite thermo-optic characteristics of silicon oxynitride and potymer materials, a hybrid integrated silicon oxynitride and polymer channel waveguide based variable optical attenuator with low power was proposed, which consisted of a polymer core and a silicon oxynitride cladding. A heater is deposited on the S-bend waveguide to form an active region so as to realize tunable optical power attenuation by utilizing thermo-optic effect. Theoretical results show that an optical attenuation of-50 dB can be achieved with an applied electrical power of 3.6 mW. Experimental result shows an attenuation of 0-40 dB, correspondingly, a maximum temperature change of 70.4℃ , and an insertion loss of 5.4 dB.

关 键 词：可变光衰减器 热光原理 混合集成 氮氧化硅 聚合物 S弯曲波导 

分 类 号：TN256[电子电信—物理电子学]