双通道MEMS微波功率传感器的悬臂梁设计  

Design of Cantilever for Dual-Channel MEMS Microwave Power Sensor

作　　者：王德波[1] 白文娟 郭艳艳[1] 赵江[1] 谌静[1] 

机构地区：[1]南京邮电大学,南京210003 [2]南京德赛西威汽车电子有限公司,南京211100

出　　处：《微电子学》2015年第3期408-412,共5页Microelectronics

基　　金：国家青年自然科学基金资助项目(11304158;11304159);江苏省青年自然科学基金资助项目(BK20140870;BK20140890);南京邮电大学引进人才资助项目(NY213024);东南大学MEMS教育部重点实验室开放研究基金资助项目

摘　　要：为实现热电式MEMS微波功率传感器与电容式MEMS微波功率传感器的兼容,得到一种性能优良的双通道MEMS微波功率传感器,需要对MEMS悬臂梁的匹配特性进行分析与设计。根据MEMS悬臂梁的一维集中参数模型,分析了MEMS悬臂梁的吸合电压,研究了MEMS悬臂梁的位移与电容的变化关系以及MEMS悬臂梁的谐振频率,得到了MEMS悬臂梁的匹配特性与MEMS悬臂梁高度的变化关系。实验结果表明,当MEMS悬臂梁的高度设计为10μm时,MEMS悬臂梁的谐振频率为16.13kHz,在8-12GHz频率范围内,回波损耗均小于-19dB。In order to realize compatibility of thermoelectric MEMS microwave power sensor and capacitive MEMS microwave power sensor, and to obtain an excellent dual-channel MEMS microwave power sensor, the matching characteristics of MEMS cantilever needs to be analyzed and designed. According to the one-dimensional MEMS cantilever lumped parameter model, the pull-in voltage of MEMS cantilever was analyzed. The relationship of capacitance change with the displacement of MEMS cantilever was analyzed, and the resonant frequency of MEMS cantilever was also analyzed. The relationship of the matching characteristics of MEMS cantilever with the height of MEMS cantilever was obtained. Experimental results showed that the resonant frequency of MEMS cantilever was 16.13 kHz when the height of the cantilever was designed at 10 μm. In the ranges from 8 GHz to 12 GHz, the return loss was less than -19 dB.

关 键 词：MEMS 双通道 功率传感器 悬臂梁 匹配特性 

分 类 号：TN432[电子电信—微电子学与固体电子学]