磁控溅射制备Er^(3+)掺杂Al_2O_3薄膜的上转换发光特性  

Synthesis and Up-Conversion Luminescence of Er^(3+)-Doped Al_2O_3 Coatings

作　　者：王俊[1] 毛鑫光[1] 沈杰[1] 

机构地区：[1]复旦大学材料科学系,上海200433

出　　处：《真空科学与技术学报》2015年第6期696-702,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家重点基础研究发展规划项目(2012CB934303)

摘　　要：Al_2O_3作为太阳能电池的钝化层,如果掺入稀土元素Er^(3+)通过吸收红外光并将其上转换为可见光被硅吸收,则可以提高太阳能的利用率。本文采用磁控溅射法制备得到厚度为500 nm左右的不同浓度Er^(3+)掺杂Al_2O_3薄膜。X射线衍射测试表明薄膜由θ-(Al,Er)_2O_3、Al_(10)Er_6O_(24)和ErAlO_3相构成。通过波长980nm的激光器激发产生光频上转换,获得了490 nm的绿光和670nm的红光发光,分别对应于Er^(3+)的~4F_(7/2)→~4I_(15/2)和~4F_(9/2)→~4I_(15/2)的能级跃迁。当Er^(3+)掺杂浓度为0.6%(摩尔比)时,上转换发光强度最强。上转换发光强度受到Al_(10)Er_6O_(24)和ErAlO_3晶体的生成以及Er^(3+)掺杂浓度的影响,并且对红光的影响要大于绿光。Er^(3+)掺杂Al_2O_3薄膜相比粉体材料具有较低的声子态密度,从而抑制了Er^(3+)无辐射跃迁,得到了不同于粉体材料的490nm绿光的发光。The Er3＋ -doped A12Oa3 coatings were deposited by magnetron sputtering to enhance the conversion efficiency of solar energy. The influence of the Er3＋ content on the up-conversion luminescence was investigated with X-ray diffraction and fluorescence spectroscopy （FL）. The results show that depending on Er3＋ content, the A1203 coatings, consisting of 0- （Al, Er）203, Al10 Er6O24 and ErAlO3, are capable of converting infrared （IR） light to red and green lights. For example, irradiated at 980 nm of laser,490 nm green-peak and 670 nm red-peak were observed for the 500 nm thick coat-ings,corresponding to Er3＋,s 4F7/2→4I5/2 and4F9/2→4I15/2 transitions,respectively. The strongest intensity was observed at 0.6 mol% of Er3＋ due to co-relation of Al10Er6O24 and ErAlO3.The Er3＋ content has a stronger impact on the red e- mission than on the green emission because the phonon state density in Er3 ＋ -doped Al2O3 coating is lower than that in Er3＋-doped A12O3 powder, resulting in suppression of the Er3＋ , snon-radiative transition and for marion of 490 nm peak

关 键 词：磁控溅射 Er^(3+)掺杂Al_2O_3薄膜 上转换发光 无辐射跃迁 

分 类 号：O433.2[机械工程—光学工程]