气体稀薄效应对微机电系统(MEMS)气体轴承-转子系统不平衡响应的影响  

Influence of Gas Rarefaction Effect on Unbalance Response of Micro-Electro-Mechanical(MEMS) Gas Bearing-Rotor System

作　　者：杨琴[1,2] 刘宇陆[1] 张海军[3] 祝长生[4] 

机构地区：[1]上海大学应用数学与力学研究所,上海200072 [2]嘉兴学院数理与信息工程学院,浙江嘉兴314001 [3]嘉兴学院机电工程学院,浙江嘉兴314001 [4]浙江大学电气工程学院,杭州310027

出　　处：《西安交通大学学报》2015年第7期134-139,共6页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目(11102071);教育部高等学校博士学科点专项科研基金资助项目(20070335184)

摘　　要：为研究气体稀薄效应对微机电系统(MEMS)气体轴承-转子系统不平衡响应的影响,给出了MEMS气体轴承-转子系统运动方程和MEMS气体轴承的雷诺方程;利用双向隐式差分算法,给出了修正雷诺方程的详细数值求解过程;将转子运动方程与雷诺方程相结合,采用4阶龙格-库塔方法计算分析了气体稀薄效应对气体轴承-转子系统不平衡响应的影响。研究结果显示,考虑气体稀薄效应后,当质量偏心距较大时,MEMS气体轴承-转子系统的失稳轴颈转速较大,表明合适的偏心质量有助于改善系统的稳定性;在相同的质量偏心距下,考虑气体稀薄效应时气体轴承-转子系统在较低轴颈转速处出现峰值,表明此时不平衡偏心质量对气体轴承-转子系统运动的影响增大。To investigate the influence of gas rarefaction effect on the unbalance response of micro-electro-mechanical system （MEMS） gas bearing-rotor system, the motion equation of the MEMS bearing-rotor system and the Reynolds equation of MEMS gas bearing are presented, and the process of solving the modified Reynolds equation using the alternating-direction implicit difference method is given. The motion equation of the rotor and the modified Reynolds equation are combined, and the influence of gas rarefaction effect on the unbalance response of MEMS gas bearing-rotor system is analyzed using the 4th-order Rounge-Kutta method. The study shows that the stability speed of the journal of MEMS rotor system is higher with ~arger mass eccentricity when the gas rarefaction effect is considered, therefore, a proper eccentric mass of the rotor could improve the stability of MEMS gas bearing-rotor system. With the same eccentric mass, the peak value of unbalance response of MEMS gas bearing-rotor system emerged at the lower rotational speed, which shows that the unbalanced eccentric mass would have much influence on the motion of MEMS rotor system when the gas rarefaction effect is taken into account.

关 键 词：微机电系统 气体轴承-转子系统 不平衡响应 稀薄效应 双向隐式差分算法 

分 类 号：TH117.2[机械工程—机械设计及理论]