溶胶-凝胶法制备ZnO薄膜及其微结构特性研究  

Microstructure Characteristics of ZnO Thin Films Prepared by Sol-Gel Method

作　　者：李旭[1] 杨定宇[1] 朱兴华[1] 孙辉[1] 高秀英[1] 

机构地区：[1]成都信息工程大学光电技术学院,成都610225

出　　处：《人工晶体学报》2015年第5期1294-1299,共6页Journal of Synthetic Crystals

基　　金：四川省教育厅重点项目(10ZA131);双流县科技局科技孵化项目(13H012)

摘　　要：采用溶胶-凝胶法(Sol-Gel)制备氧化锌(ZnO)薄膜,研究镀膜层数和退火温度对ZnO薄膜晶体结构、光谱性质及表面形貌的影响。X射线衍射谱测试表明,退火温度为600℃、镀膜层数为10层时制备样品的晶粒尺寸最大,结晶度最好。紫外-可见透过谱发现,样品退火后其透过率曲线变得陡直,光学带隙随退火温度升高而逐渐减小。光致发光谱测试显示,ZnO薄膜的发光谱包含388 nm和394 nm附近的两个主要发光峰,分别对应于本征发射和缺陷发射,其强度随退火温度升高呈现相反的变化。原子力显微照片则显示了随退火温度的升高制备样品表面晶粒的分布趋于均匀而致密。ZnO thin films were prepared by sol-gel method, and the influence of spin-coated layers and annealing temperature on the sample crystal structure, optical properties and surface morphology were studied. X-ray diffraction （XRD） results show that the sample with 10 coated layers after annealing at 600 ℃ has a largest grain size and best crystallinity. The UV-Vis transmittance spectra are found to be steeper after annealing and the optical band gap decreases as the annealing temperature increasing. Photoluminescence spectra of ZnO films reveal the peak can be decomposed into two fitting peaks near 388 nm and 394 nm, corresponding to an intrinsic emission and a defect emission respectively, and the intensity of this two peaks show opposite changes as annealing temperature increasing. It is found that the samples present more uniform and compact surface as the annealing tempeature increasing.

关 键 词：溶胶-凝胶法 氧化锌薄膜 微结构 旋涂层数 退火温度 

分 类 号：O484.4[理学—固体物理]