光学元件气囊抛光去除效率影响因素研究  

Research on influences of removal rate for optical component in bonnet polishing

作　　者：姜涛[1] 郭隐彪[1] 王詹帅[1] 林桂丹[1] 

机构地区：[1]厦门大学机电工程系,福建厦门361005

出　　处：《华中科技大学学报（自然科学版）》2015年第1期12-15,共4页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(51275433);国家科技重大专项资助项目(2013ZX04006011-206);中国工程物理研究院超精密加工技术重点实验室开放基金资助项目(KF13011)

摘　　要：基于Preston方程分析了气囊抛光特性,确定去除函数的三个重要特征,即抛光斑尺寸、形状以及去除量,得到影响光学元件气囊抛光材料去除效率的主要参数.通过定点抛光实验,分析气囊充气压强、压缩量、主轴转速对BK7光学元件去除函数和材料去除效率的影响.结果表明:充气压强与压缩量对于气囊抛光去除函数的形状影响较大,去除效率随气囊充气压强增大先升高到2.08mm3/min后逐渐降低然后又升高,压缩量与气囊转速的提高增大了材料的去除效率,分别可以达到6.84mm3/min和5.04mm3/min.Characteristics of bonnet polishing were analyzed based on Preston equation.Characteristics of the remove function were determined by spot size,shape,and amount of removal,which affected optical component bonnet polishing material removal rate.And through the fixed-point polishing experiments on BK7 optical component,the influences on removal function and material removal rate under bonnet pressure,amount of press and spindle speed were analyzed.The results show that the bonnet pressure and amount of press have a great influence on the shape of the bonnet polishing influence function,and the removal rate curve increases with the bonnet pressure presents a trend of increases 2.08mm3/min at high and then decreases and iuncreases again.With the increase of amount of press and spindle speed,the removal rate curves are raised to 6.84 and 5.04mm3/min.

关 键 词：气囊抛光 去除效率 工艺参数 去除函数 抛光斑尺寸 

分 类 号：TH706[机械工程—仪器科学与技术]