基于回归分析的绝对式光栅尺精度提高方法  

Method of improving the accuracy of absolute linear encoder using regression analysis

作　　者：乔栋[1,2] 续志军[1] 吴宏圣[1] 曾琪峰[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《华中科技大学学报（自然科学版）》2015年第1期21-23,79,共4页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家科技重大专项资助项目(2013ZX04007-021)

摘　　要：提出一种使用回归分析提高绝对式光栅尺测量精度的方法.分析了影响绝对式光栅尺测量精度的因素以及提高其测量精度的方法;对JC09型绝对式光栅尺的测量值和真值进行回归分析,得到回归方程;对回归方程进行了显著性分析,并提出了修正方程;通过实验验证了该方法能够有效提高绝对式光栅尺的测量精度.实验结果表明：在绝对式光栅尺800mm测量长度内,测量精度由0∽18.25μm提高到-4.21∽5.72μm.另外,该方法具有成本低、计算量少以及易于实现的优点.A method of regression analysis for improving the accuracy of absolute linear encoder was presented.Firstly,the factors affecting the accuracy of the absolute linear encoder and the methods of improving the accuracy were introduced.Secondly,the regression equation for the JC09 absolute linear encoder was obtained by a linear regression between the measured value and the true value of the linear encoder.The significance level of the regression equation was analyzed,and the equation for the data correction of actual measurement was then acquired.Finally,the effectiveness of the proposed method to improve the accuracy of the linear encoder was verified by experiment,and the results show that the accuracy is improved from 0∽18.25μm to-4.21∽5.72μm in a measurement length of 800 mm.This method is effective and easy to be realized in industrial production,and with low cost.

关 键 词：测量 回归分析 绝对式光栅尺 精度 误差补偿 

分 类 号：TH711[机械工程—测试计量技术及仪器]