基于快速Chirplet匹配追踪的切筋成形设备振动分析  

Vibration Analysis of IC Trimming and Forming Mechanisms Based on Rapid Chirplet Matching Pursuit

作　　者：陈忠[1,2] 黄勉[1,2] 张宪民[1,2] 章青春 

机构地区：[1]华南理工大学广东省精密装备与制造技术重点实验室,广州510641 [2]华南理工大学机械与汽车工程学院,广州510641 [3]东莞朗诚微电子设备有限公司,东莞523945

出　　处：《振动．测试与诊断》2015年第3期464-468,589,共5页Journal of Vibration,Measurement & Diagnosis

基　　金：广东省科技计划资助项目(2012B011300010);广东省省部产学研资助项目(2012B091100141)

摘　　要：针对保证集成电路切筋成形设备对引线框架模切精度的要求,运用快速线性调频小波(chirplet)匹配追踪对集成电路切筋成形设备进行了振动分析。对切筋成形设备关键部位不同转速下的振动信号,运用快速线性调频小波匹配追踪算法进行信号分解,得到信号的时频分布。根据常见故障的时频原子特点,从时频图上对系统的固有频率以及冲裁运动等特征频率进行了识别。实验结果表明,基于快速线性调频小波的匹配追踪算法具有较高的时频分辨力,能够在大量非平稳信号中提取特征频率成分,准确反映设备的工作状况,为该设备的故障诊断提供可靠的依据。Aiming at the die-cutting precision of integrated circuit(IC)trimming and forming mechanisms,the rapid chirplet matching pursuit is used to analyze the vibration of a trimming and forming mechanism.Based on the fast matching pursuit of gaussian chirps,an algorithm is used to decompose the vibration signals of the key parts of the mechanism and obtain the chirp spectrograms.According to the characteristics of the atoms,the intrinsic frequency and other features can be identified from these spectrograms.The experiments indicate that the algorithm based on the fast matching pursuit of gaussian chirps,which has fine time-frequency resolution,can extract vibration characteristics from massive nonstationary signals,precisely reflect the work condition of the mechanisms,and lay a reliable basis for fault diagnosis.

关 键 词：线性调频小波 匹配追踪 切筋成形 振动分析 

分 类 号：TH17[机械工程—机械制造及自动化]