贵金属纳米颗粒催化刻蚀硅表面微纳结构现状  

Status of the Micro-Nano Structures on the Si Surface Etched by Noble Metallic Nanoparticles Catalytic

作　　者：刘海[1] 白一鸣[1] 陈诺夫[1] 延玲玲 高征[1] 牟潇野 

机构地区：[1]华北电力大学新能源电力系统国家重点实验室,北京102206

出　　处：《微纳电子技术》2015年第7期452-459,473,共9页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61006050);国家高技术研究发展计划(863计划)资助项目(2011AA050507);北京市自然科学基金资助项目(2151004);中央高校基本科研业务费专项资金资助项目(13ZD05)

摘　　要：简述了目前一些贵金属纳米颗粒催化刻蚀Si表面微纳结构的研究工作,并叙述了催化刻蚀反应的主要过程。在系统介绍催化刻蚀化学反应机理的基础上,对催化刻蚀的阴极、阳极反应进行了细致的探讨。根据不同的阳极和阴极反应方程式,讨论了不同的中间产物以及不同中间产物在反应中的作用机理。然后介绍了贵金属纳米颗粒的物理法和化学法两种制备方法。结合目前国内外研究进展,讨论了贵金属纳米颗粒种类、尺寸以及溶液成分比例对硅表面微纳结构的影响。最后对贵金属纳米颗粒催化刻蚀硅表面微纳陷光结构的未来前景进行了展望。Some researches of the micro-nanostructures on the Si surface etched by noble metallic nanoparticles catalytic are presented,and then the main processes of the catalytic etching are described.Based on the detailed introduction of the chemical reaction mechanisms for the catalytic etching,the cathode and anode reactions of the catalytic etching are systematically discussed.According to the different anode and cathode reaction equations,the different intermediate products and the action mechanism of different intermediate products during the reaction are discussed.The chemical and physical methods for preparing the noble metal nanoparticles are introduced.With the latest research progresses at home and abroad,the effects of the type,size and solution composition of the noble metallic nanoparticles on the micro-nanostructures of the Si surface are discussed.Finally,the future prospect for the Si surface light trapping micro-nano structures etched by noble metallic nanopartieles catlytic is forecasted.

关 键 词：贵金属纳米颗粒 催化刻蚀 微纳结构 硅衬底 反射率 

分 类 号：TN305.7[电子电信—物理电子学]