中间层类型对类金刚石涂层键合结构和性能的影响行为  

Influence of interlayers on the bonding structure and performance of DLC coatings

作　　者：李娜[1] 许振华[1] 纪锡旺 王凯[1] 何利民[1] 

机构地区：[1]北京航空材料研究院,北京100095 [2]上海汽车变速器有限公司,上海201822

出　　处：《真空》2015年第4期60-64,共5页Vacuum

摘　　要：采用阴极电弧离子镀和等离子体增强化学气相沉积（PECVD）相结合的技术方法，在304不锈钢基体上分别沉积制备了Ti/DLC和Ti/TiN/TiAlN/DLC复合涂层。选用原子力显微镜、拉曼光谱对涂层的形貌和结构进行表征测试。同时，利用显微硬度计、划痕测试仪系统地分析了涂层的显微硬度和界面结合性能，并研究了其摩擦磨损行为。研究结果表明：Ti/TiN/TiAlN/DLC复合涂层体系具有较高硬度（-2130HV）的同时结合性能最优（结合力-53.7 N），抗磨损能力最强。在相同试验条件下，无涂层的基体摩擦系数为0.45，单层DLC、Ti/DLC 和 Ti/TiN/TiAlN/DLC 涂层的摩擦系数则分别为0.15、0.12和0.07。Ti/TiN/TiAlN/DLC复合涂层可有效提高304不锈钢的耐磨损性能，降低摩擦系数。Ti/DLC and Ti/TiN/TiAlN/DLC composite coatings were deposited on 304 stainless steel substrate by the methods of cathodic arc ion plating and PECVD. AFM, Raman spectroscopy, micro-hardness tester, Rockwell-C indenter, scratch tester and ball-on-disk wear tester were used to study the composition, morphology, micro-hardness, toughness, interfacial adhesion perfor-mance and wear resistance of the two DLC composite coatings, respectively. Their adhesive and tribological performances were e-valuated and compared from the micro-hardness and the bonding performance of the DLC films. The results show that the highest adhesion is obtained from the Ti/TiN/TiAlN/DLC coating with micro-hardness of about 2130HV. Under the same experimental conditions, coefficient of friction without coatings is attained to be ~0.45, and the vales of single DLC, Ti/DLC and the tested value of Ti/TiN/TiAlN/DLC coatings are 0.15, 0.12 and 0.07, respectively. The Ti/TiN/TiAlN/DLC coatings can effectively im-prove the wear resistance of 304 stainless steel substrate, and reduce the friction coefficient.

关 键 词：类金刚石 中间层 结合强度 摩擦磨损 

分 类 号：TB79[一般工业技术—真空技术] TK11[动力工程及工程热物理—热能工程]