T型硅微悬臂梁频率温度系数的测试研究  

Study on the measurement of natural frequency temperature coefficient for T-shaped silicon microcantilever

作　　者：佘东生[1] 杨一柳[2] 李琨[1] 王晓东[3] 王立鼎[3] 

机构地区：[1]渤海大学工学院,锦州121013 [2]渤海大学计算机基础教研部,锦州121013 [3]大连理工大学机械工程学院,大连116024

出　　处：《仪器仪表学报》2015年第7期1470-1478,共9页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51305191)项目资助

摘　　要：为了获得T型单晶硅微悬臂梁的固有频率温度系数,首先从理论上分析了T型微悬臂梁的固有频率随温度的变化规律,并建立了其固有频率的温度系数模型。随后搭建了带有高温环境加载功能的MEMS微结构动态特性测试系统,采用OFV534激光多普勒测振仪获取微结构的振动响应,采用基于压电陶瓷的底座激励方法实现对微结构的激励,在激励装置中采用了一个可动机构,解决了压电陶瓷在高温环境下使用的难题。最后,使用带有高温环境加载功能的MEMS微结构动态特性测试系统,测试了一种典型T型单晶硅微结构的动态特性,测试温度范围为室温~300℃,得到硅微悬臂梁的固有频率温度系数约为-2.71×10-5/℃,与理论分析的结果具有很好的一致性。To obtain the natural frequency temperature coefficient of T-shaped silicon microcantilever, firstly, the variation law of the natural frequency with temperature was theoretically analyzed, and the theoretical model of the natural frequency temperature coefficient was established. Secondly, the dynamic characteristic measurement system with high temperature environment loading unit for MEMS microstructures was developed. In the system, the OFV534 laser Doppler vibrameter was used to obtain the vibration responses of the microstructures, and the base excitation method based on piezoelectric ceramic was used to excite the microstructure. A moveable mechanism was designed in the excitation device to ensure that the piezoelectric ceramic can be used in high temperature environment. Finally, the dynamic characteristic measurement system with high temperature environment loading unit was adopted to test the dynamic characteristic of a typical Tshaped microeantilever, the test temperature range is from room temperature to 300℃. The obtained natural frequency temperature coeffi- cient of the silicon microcantilever is about -2.71 × 10-5/℃, which is in good agreement with the theoretical analysis result.

关 键 词：MEMS测试 T型微悬臂梁 高温环境 固有频率温度系数 底座激励 

分 类 号：TH825[机械工程—仪器科学与技术]