膨胀法真空系统的建立与不确定度来源分析  

Analysis of the Establishment and Uncertainty of the Vacuum System of Expansion Method

作　　者：郭知明[1] 张红杰[1] 潘志刚[1] 

机构地区：[1]天津市计量监督检测科学研究院,天津300192

出　　处：《科技与创新》2015年第17期1-2,共2页Science and Technology & Innovation

摘　　要：真空计量是真空技术应用和发展的重要手段,真空静态膨胀法是真空计量的基础标准,其一级膨胀法和二级膨胀法为保证真空量值的准确性、统一度提供了技术支持。它是利用波义耳—马略特定律,通过膨胀法或与石英规的直接比对校准法实现计量真空计的目的,其不确定度的分析符合JJF 1050—1996《工作用热传导真空计校准规范》和JJF 1062—1999《电离真空计校准规范》的要求。Vacuum measurement is an important method for vacuum technology application and development. And the vacuum static expansion method is the basic standard of vacuum measurement, and the first order expansion method and the two-stage expansion method provide technical support for the accuracy and uniformity of the vacuum measurement. It is to achieve the purpose of measuring vacuum meter by the expansion method or the direct comparison with quartz gauge, the analysis of the uncertainty of the JJF 1050-1996 ＂work with thermal conductivity vacuum gauge calibration standard＂ and JJF 1062-1999 ＂ionization vacuum gauge calibration specification＂ requirements.

关 键 词：真空计量 真空静态膨胀法 真空计 不确定度 

分 类 号：TB77[一般工业技术—真空技术]