大口径平面快速抛光机床误差模型研究  

Research on error modeling of large aperture optical- flat rapid polishing machine

作　　者：谢瑞清[1] 王健[1] 陈贤华[1] 廖德锋[1] 赵世杰[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《制造技术与机床》2015年第8期30-34,共5页Manufacturing Technology & Machine Tool

基　　金：国家科技重大专项资助项目(2013ZX04006011-101)

摘　　要：介绍了大口径平面光学元件快速抛光机床的加工原理,分析了全口径抛光工艺中抛光模与工件之间的精度传递关系,并推导了修整器几何参数对抛光模修整精度及元件加工面形精度的影响规律。对大口径平面快速抛光机床的各项几何误差源进行了分析,并基于多体系统理论,建立了机床修整轴综合空间姿态误差的理论计算模型,详细阐述了机床误差建模过程。The working principle of large aperture optical - flat rapid polishing machine is introduced. Accuracy transfer relationship between platen and workpiece in full aperture polishing processing is analyzed, al- so, effect of conditioner geometric parameters on platen conditioning accuracy and workpiece polishing accuracy is deduced. The geometric errors of machine tool is analyzed. A computation model of synthe- sis error of conditioner axes spacial pose of RP machine is established based on multi - body system the- ory, and the modeling process is detailed.

关 键 词：光学元件 抛光 面形精度 机床误差 模型 

分 类 号：TH161.2[机械工程—机械制造及自动化]