面向激光防护应用的金刚石/V_2O_5膜系设计与制备  

Design and fabrication of diamond/V_2O_5 films in continuous laser protection

作　　者：左杨平[1,2] 卢文壮[1,2] 张圣斌[1] 余亚平[1] 冯森[1] 左敦稳[1] 

机构地区：[1]南京航空航天大学机电学院,江苏南京210016 [2]江苏省精密与微细制造技术重点实验室,江苏南京210016

出　　处：《红外与激光工程》2015年第8期2491-2495,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(51275230);南京航空航天大学研究生创新基地(实验室)开放基金(kfjj130116);中央高校基本科研业务费专项资金(3082013NP2013505)

摘　　要：针对目前激光对红外光电传感器的威胁,为满足红外传感器在可见光与3～5μm波段高透射,低于3μm波段高反射的使用要求,采用光学金刚石作为红外窗口材料,采用具有热致相变特性的V2O5薄膜作为激光防护涂层,采用Zn S和Yb F3作为高低折射率材料,依据膜系设计理论设计具有抗激光致盲能力的红外增透膜并采用TFCalc优化膜系。采用离子辅助法制备增透膜,采用磁控溅射法在实验制备增透膜上制备V2O5涂层。采用扫描探针显微镜对光学薄膜的表面三维形貌及粗糙度进行测试分析,对薄膜进行红外光谱测试分析,结果满足使用设计要求。In order to satisfy the requirements of infrared detector that can penetrate in visible and 3-5μm double wave bands, be reflected in 〈3μm wave band, optical diamond was selected as infrared window material to protect infrared detector from laser beams. V2O5 film with thermally induced phase transition properties was selected as anti-laser blinding coating. ZnS and YbF3 were chosen as high and low index of refraction materials respectively. Infrared anti-reflective coating applied on laser protection was designed based on design theory of films and optimized by TFCalc. Anti-reflective coatings were fabricated by ion assisted deposition and V2O5 coating was fabricated on anti-reflective coatings by using the method of magnetron sputtering. The surface topography and roughness of optical thin film were tested by scanning probe microscope and the infrared spectra was tested and analyzed. The results meet the requirements of design and application.

关 键 词：激光防护 膜系设计 红外增透 V2O5 磁控溅射 

分 类 号：TN214[电子电信—物理电子学]