NdFeB磁控溅射SiC薄膜的结构及耐腐蚀性能  

Structure and corrosion resistance of SiC thin film coated on NdFeB by magnetron sputtering

作　　者：陶磊[1] 李合琴[1] 黄依琴[1] 左敏[1] 柏佩文 陈静武 

机构地区：[1]合肥工业大学材料科学与工程学院,安徽合肥230009 [2]安徽大地熊新材料股份有限公司,安徽合肥231500

出　　处：《合肥工业大学学报（自然科学版）》2015年第8期1040-1044,共5页Journal of Hefei University of Technology：Natural Science

基　　金：安徽省自然科学基金资助项目(090414182);安徽省高校自然科学基金资助项目(KJ2009A091;KJ2012A228);合肥工业大学产学研校企合作资助项目(13-332)

摘　　要：文章采用射频磁控溅射法在烧结钕铁硼表面沉积SiC薄膜,将制备的薄膜分别在200、400℃氩气气氛中退火120min。用X射线衍射仪和原子力显微镜表征薄膜的结构和形貌,并研究了镀膜NdFeB在NaCl溶液中的耐腐蚀性能。动电位极化曲线结果表明,未镀膜NdFeB试样的自腐蚀电流密度为1.37×10-6 A/cm2左右,而镀膜未退火试样的自腐蚀电流密度约为1.54×10-8 A/cm2。结果表明,在快速且破坏性强的腐蚀情况下,镀膜试样抗腐能力比未镀膜好。The SiC thin film was prepared on sintered NdFeB by RF magnetron sputtering. Then they were annealed at 200 ℃ and 400 ℃ for 120 min under argon atmosphere. The structure and morphology of the SiC thin film were studied by XRD and AFM. The corrosion resistance of the NdFeB specimen coated with SiC layer in a NaCl solution was also studied. The potentiodynamic polarization curve showed that the corrosion current density of NdFeB was approximately 1.37 ×10^-6A/cm^2, however the corrosion current density was approximately 1.54 ×10^-8A/cm^2 for the NdFeB specimen coated with SiC layer without annealing. The result shows that the NdFeB specimen coated with SiC layer presents better resistance to the fast and destructive corrogion than the bare NdFeB.

关 键 词：钕铁硼 SIC薄膜 射频磁控溅射 耐腐蚀性 

分 类 号：TF125.8[冶金工程—粉末冶金]