基于激波的MEMS微结构底座冲击激励方法研究  

Study on the impact base excitation method based on shock wave for MEMS microstructures

作　　者：佘东生[1] 杨一柳[2] 魏泽飞[1] 王晓东[3] 王立鼎[3] 

机构地区：[1]渤海大学工学院,锦州121013 [2]渤海大学计算机基础教研部,锦州121013 [3]大连理工大学机械工程学院,大连116024

出　　处：《仪器仪表学报》2015年第8期1892-1900,共9页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51305191)项目资助

摘　　要：为了能够在较高的温度环境中测试MEMS微结构的机械模态参数，本文提出了一种以高压电容空气放电为手段，以激波冲击为特征的底座激励方法。阐述了基于激波的底座冲击方法的原理和具体实现方式，并分析了放电电容、回路电阻、回路电感等参数与激振装置激励能力的关系。设计并研制了可应用在室温环境中的MEMS微结构动态测试装置，并在此基础上研制了高温环境微结构动态测试系统，系统中使用基于激波的底座冲击激励装置对微结构进行激励，采用激光多普勒测振仪获取微结构的振动响应信号。分别测试了两种尺寸的单晶硅微悬臂梁在室温-500％温度环境下的动态特性，结果表明微悬梁的谐振频率随温度的升高而减小，并呈近似线性关系，与其他研究人员的研究结果有很好的一致性，验证了基于激波的底座冲击激励方法的可行性。To test the mechanical modal parameters of MEMS microstructures under high temperature environment, an impact base excita- tion method is proposed in this paper, which adopts the way of high voltage capacitor air discharge and takes shock wave impact as char- acteristic. The principle and implementation method of the impact base excitation method based on shock wave are elaborated. The influ- ence of the discharge capacitance, circuit resistance, circuit inductance and other parameters on the excitation capacity of the excitation device is analyzed. The dynamic test systems for MEMS microstructures under room temperature environment and high temperature envi- ronment were both designed and developed. In the systems, the impact base excitation device based on shock wave is used to excite the microstructures, and a laser Doppler vibrometer is used to obtain the vibration response signals of the microstructures. The dynamic char- acteristics of the silicon mierocantilevers of two different dimensions were tested under the temperature environment range from room tem- perature to 500~（：. The results show that the resonance frequencies of the microcantilevers decrease with the increasing of the tempera- ture, and also there is an approximate linear relationship between the resonance frequency and the temperature; the results are in good agreement with the findings of other researchers, which verifies the feasibility of the impact base excitation method based on shock wave.

关 键 词：MEMS动态特性测试 激波 底座激励 微悬臂梁 高温环境 

分 类 号：TH825[机械工程—仪器科学与技术]