Si3N4球表面DLC膜在干摩擦条件下的摩擦学性能分析  

Tribological Properties of Diamond-Like Carbon Coatings on Si_3N_4 Ball in Dry Friction Condition

作　　者：彭润玲[1] 刘官[1] 曾群锋[2] 董光能[2] 张俊锋[3] 徐飞燕[1] 

机构地区：[1]西安工业大学机电工程学院,西安710021 [2]西安交通大学现代设计及转子轴承系统教育部重点实验室,西安710049 [3]中国船舶重工集团公司第七0四研究所,上海200031

出　　处：《真空科学与技术学报》2015年第8期955-962,共8页Chinese Journal of Vacuum Science and Technology

基　　金：陕西省教育厅专项科研计划项目(14JK1334);陕西省工业科技攻关计划项目(2013K09-20);国家自然科学基金项目(51175406)

摘　　要：采用非平衡磁控溅射技术在Si3N4球及高速钢基体上制备了类金刚石(DLC)膜。采用UMT-II型球盘式摩擦磨损试验机分别考察了Si3N4球、镀DLC膜Si3N4球及GCr15球的摩擦学性能,并分析了不同滑动速度和载荷下Si3N4球表面DLC膜的摩擦学性能。研究结果表明:Si3N4球的摩擦系数及磨损率约为GCr15球的一半,但因Si3N4球脆性较大,在摩擦过程中摩擦接触表面容易剥落;Si3N4球表面镀DLC膜能有效地改善Si3N4球脆性大的弱点,并具有良好的减摩作用;Si3N4球表面DLC膜所组成摩擦副的平均摩擦系数随着载荷的增加而增大;随着速度的增加摩擦副的摩擦系数先增大而后减小,滑动速度对摩擦副摩擦系数的影响比载荷明显。实验结果表明Si3N4球表面镀DLC膜适合于高速轻载的工况。We addressed the tribological properties of thediamond-like carbon（ DLC） coatings,deposited on substrates of Si3N4 balls and high-speed steel by unbalanced magnetron sputtering. The impact of the sliding-velocity and load in dry friction tests on the friction coefficient,wear-rate,and morphology of wear-tracks,was investigated with ball-on-disc tribo-meter. The results show that depending on the sliding velocity and load,the DLC coatings significantly reduced the friction-coefficient,wear-rate and brittleness of the Si3N4 balls. To be specific,peeling-off of the DLC coatings easily occurred due to the weak interfacial adhesion. The friction coefficient and wear-rate of the DLC coated Si3N4 balls is 50% lower than those of the GCr15 balls. The friction-coefficient and wear-rate increased with an increase of the load; and as the sliding velocity increased,the average friction-coefficient changed in a decrease-increase mode,accompanied by an increase of the wear-rate possibly because of increasing graphitization of DLC coatings. We suggest that the DLC coated Si3N4 balls may work best under high speed and light load conditions.

关 键 词：氮化硅球 类金刚石膜 摩擦学性能 工况参数 

分 类 号：TH117.1[机械工程—机械设计及理论]