具有P型覆盖层新型超级结横向双扩散功率器件  

New super junction lateral double-diffused metal-oxide-semiconductor field-effect transistor with the P covered layer

作　　者：李春来[1] 段宝兴[1] 马剑冲 袁嵩[1] 杨银堂[1] 

机构地区：[1]西安电子科技大学微电子学院,宽禁带半导体材料与器件教育部重点实验室,西安710071

出　　处：《物理学报》2015年第16期377-383,共7页Acta Physica Sinica

基　　金：陕西省科技统筹创新工程计划(批准号:DF0105142502);国家重点基础研究发展计划(批准号:2014CB339900,2015CB351906);国家自然科学基金重点项目(批准号:61234006,61334002)资助的课题~~

摘　　要：为了设计功率集成电路所需要的低功耗横向双扩散金属氧化物半导体器件(lateral double-diffused MOSFET),在已有的N型缓冲层超级结LDMOS(N-buffered-SJ-LDMOS)结构基础上,提出了一种具有P型覆盖层新型超级结LDMOS结构(P-covered-SJ-LDMOS).这种结构不但能够消除传统的N沟道SJ-LDMOS由于P型衬底产生的衬底辅助耗尽问题,使得超级结层的N区和P区的电荷完全补偿,而且还能利用覆盖层的电荷补偿作用,提高N型缓冲层浓度,从而降低了器件的比导通电阻.利用三维仿真软件ISE分析表明,在漂移区长度均为10μm的情况下,P-covered-SJ-LDMOS的比导通电阻较一般SJ-LDMOS结构降低了59%左右,较文献提出的N型缓冲层SJ-LDMOS(N-buffered-SJ-LDMOS)结构降低了43%左右.In order to design the lateral double-diffused metal-oxide-semiconductor field-effect transistor （LDMOS） with low loss required for a power integrated circuit, a new super junction LDMOS with the P covered layer which is based on the existing N buffered super junction LDMOS is proposed in this paper for the first time. The key feature of the proposed structure is that the P-type covered layer is partly above the N-type of the super junction layer, which is different from the N buffered super junction LDMOS. In this structure, the specific on-resistance of the device is reduced by using the high doped super junction layer; the problem of the substrate-assisted depletion which is produced due to the P-type substrate of the N-channel super junction LDMOS is eliminated by completely compensating for the charges of the N-type buffered layer and the P-type covered layer, thus improving the breakdown voltage. The charges of the N-type and P-type pillars are depleted completely. A new transmission path at the on-state is formed by N buffered layer to reduce the specific on-resistance, which is similar to the N buffered super junction LDMOS. However, the effect of N-type buffered layer of N buffered super junction LDMOS is not fully used. The drift region of the device is further optimized by the proposed device to reduce the specific on-resistance. The charge concentration of the N-type buffered layer in the proposed device is improved by the effect of charge compensation of the P covered layer. It is clear that high breakdown voltage and low specific on-resistance are realized in the proposed device by introducing the P-type covered layer and the N-type buffered layer. The results of the 3 D-ISE software suggest that when the drift region is on a scale of 10 μm, a specific on-resistance of 4.26 mΩ.cm^2 obtained from P covered super junction LDMOS by introducing P covered layer and N buffered layer is reduced by about 59% compared with that of conventional super junction LDMOS which is 10.47 mΩ.cm^2, and reduced b

关 键 词：横向双扩散金属氧化物半导体器件 超级结 比导通电阻 P型覆盖层 

分 类 号：TN386[电子电信—物理电子学]