AlCrTaTiZrN_x高熵合金纳米涂层的微观组织和力学性能研究  

Research on Microstructure and Mechanical Properties of AlCrTaTiZrN_x High-entropy Alloy Nanostructure Coating

作　　者：王馨[1,2] 汪龙[1] 李荣斌[1,2] 孙勇毅[1] 陈梦蝶[2] 

机构地区：[1]上海理工大学机械工程学院,上海200093 [2]上海电机学院,上海200245

出　　处：《热加工工艺》2015年第16期198-201,共4页Hot Working Technology

基　　金：上海市教委科研创新计划项目(13ZZ143;15ZZ104);上海市闵行区校合作项目(2013MH198);上海市军民结合专项(2014);大学生创新计划项目(G2-13DXSCX-040)

摘　　要：通过热压方法制备AlCrTaTiZr高熵合金合金靶材,采用磁控溅射方法在抛光后Si基体表面制备AlCrTaTiZrNx高熵合金涂层,并用扫描电镜、X射线衍射和纳米压痕仪等研究了靶成分、相结构及涂层的微观形貌、成分和常规力学性能。结果表明,AlCrTaTiZr高熵合金靶材为体心立方结构,AlCrTaTiZrNx高熵合金薄膜均匀致密,未通入氮气的薄膜为非晶态,通入氮气的薄膜晶体结构均为简单的面心立方结构。当氮气流量百分比为10%时,薄膜力学性能最好,其硬度和杨氏模量分别达到了22.9GPa和234.77GPa。High-entropy alloy of AlCrTaTiZr was synthesized by hot-pressing. High-entropy alloy coating of AlCrTaTiZrNx was prepared on silicon alloy surface, which was polished by reactive magnetron sputtering. Component phase structure, composition, microstructure and mechanical properties of the prepared coating were evaluated by SEM, XRD and nano-identation. The results show that the crystals structure of high-entropy alloy AlCrTaTiZr is BCC.The high-entropy alloy coating of AlCrTaTiZrNx uniform and compact. The film is amorphous, under no nitrogen gas experiment condition. The film＇s phase lattice type is FCC. The mechanical properties of the film is optimal better when the nitrogen flowas to 10%. Hardness and Young＇s modulus are 22.9 GPa and 234.77 GPa.

关 键 词：高熵合金 磁控溅射 纳米涂层 非晶晶化 

分 类 号：TG115[金属学及工艺—物理冶金]