椭偏法研究硫化锌薄膜的中红外光学特性  

Study of Mid-infrared Optical Properties of ZnS Thin Films by Spectroscopic Ellipsometry

作　　者：王者 肖峻[1] 马孜[2] 

机构地区：[1]西南民族大学电气信息工程学院,成都610041 [2]西南技术物理研究所,成都610041

出　　处：《材料导报（纳米与新材料专辑）》2015年第1期93-97,共5页

基　　金：西南民族大学研究生"创新型科研项目"(CX2014SZ129)

摘　　要：采用电子束蒸发法在K9玻璃衬底上分别制备了设计厚度为115nm、467nm、652nm的硫化锌薄膜，分别记为A、B、C；采用椭偏法研究薄膜的光学特性。对薄膜A、B、C进行Brendel振予拟合，根据ZnS薄膜特性及成膜特点，建立模型“基底（K9玻璃）／有效介质层（50％K9玻璃及50％ZnS）／ZnS薄膜／表面粗糙层（50%ZnS玻璃及50％空气）／空气”，得到了ZnS薄膜的光学常数曲线和厚度。结果表明，用Brendel振子建立的上述模型对实验数据进行拟合，得到了较小的评价函数MSE；硫化锌薄膜在3000-12500nm波长范围内折射率n和消光系数k都随波长的增加而减小，消光系数惫在长波趋近于0。ZnS薄膜的测量厚度与设计厚度接近。该研究结果对制备和测量高质量的ZnS薄膜有参考意义。ZnS films with different thickness were prepared on K9 glass substrate by electronic beam evapora- tion. They were denoted by A, B,C. The optical properties of thin films were studied by spectroscopic ellipsometry. The measured date of film A, B, C were fitted by Brendel oscillator, and based on ZnS film properties and the film forming characteristic of the ZnS film,building the model＂substrate（K9 glass）/EMA（50% K9 glass and 50% ZnS）/ ZnS/rough surface layer（50% ZnS and 50% air）/air＂. The optical constants curve and thickness of ZnS thin film were got. The results show that the evaluation function MSE is small when Brendel model is used in data fitting. Within the wavelength range of 3000-12500 nm, the ZnS thin films refractive index and extinction coefficient are reduced with increasing wavelength. The extinction coefficient tends to zero near the long wavetengh. The thickness of ZnS measured value was closest to the theoretical value. The results have certain reference value to measurement and prepara- tion of high quality ZnS thin film.

关 键 词：薄膜 光学常量 椭偏法 ZNS 薄膜厚度 

分 类 号：O484.5[理学—固体物理]