AlN原料的钨网炉高温提纯  

Purification of AlN Source Material Using a Tungsten Mesh Furnace

作　　者：刘京明[1] 刘彤[1] 杨俊[1] 陶东言[1] 段满龙[1] 董志远[1] 赵有文[1] 李百泉 

机构地区：[1]中国科学院半导体研究所材料开放重点实验室,北京100083 [2]北京华进创威电子有限公司氮化铝研发中心,北京100023

出　　处：《材料科学与工程学报》2015年第4期601-604,共4页Journal of Materials Science and Engineering

摘　　要：商品氮化铝粉料中含有高浓度的氧、碳及金属杂质,需经过高温提纯处理后才能用于物理气相法氮化铝晶体生长。与感应加热相比,钨网电阻加热可有效避免碳、氧等的二次沾污,势必具有良好的提纯效果。本文采用钨网炉对AlN原料进行高温烧结提纯处理,通过X射线能谱仪(EDS)、气体分析技术(IGA)和辉光放电质谱仪(GDMS)对烧结处理后AlN的杂质含量进行了测试分析,结果表明经钨网炉高温烧结处理后,AlN原料中杂质含量明显降低,其中的氧、碳去除效果显著。还进一步分析了杂质挥发、原料损耗随温度、时间变化的规律。Commercial A1N source material needs to be purified by high temperature sintering prior to the single crystal growth for the high concentrations of oxygen, carbon and metal impurities. Comparing with induction heating furnace, tungsten mesh furnace may do better purification to the commercial A1N as it can avoid second impurity contamination effectively. A1N source powder was sintered at high temperature in the tungsten mesh furnace. Energy dispersive spectrometer （EDS）, instrument gas analysis （IGA） and glow discharge mass spectrometry （GDMS） were used to characterize the sintered samples. The results show that oxygen and carbon which were the main problematic impurities, are removed effectively. Furthermore, temperature and time dependence of impurities sublimation was also analyzed in this paper.

关 键 词：氮化铝 钨网炉 杂质 提纯 

分 类 号：O782[理学—晶体学]