UV-LIGA技术制备频率选择表面的研究  

Study of the Frequency Selective Surface by Using UV-LIGA Technique

作　　者：林彬彬[1] 陈迪[1] 林树靖[1] 谢耀[1] 袁涛[1] 崔大祥[1] 

机构地区：[1]上海交通大学电子信息与电气工程学院仪器科学与工程系薄膜与微细技术教育部重点实验室,上海200240

出　　处：《微纳电子技术》2015年第9期597-602,共6页Micronanoelectronic Technology

基　　金：上海航天科技创新基金资助项目(SAST201245)

摘　　要：针对未来空间毫米波亚毫米波准光技术的应用,对其核心器件频率选择面(FSS)的加工技术进行了研究。通过CST MWS软件对118 GHz频率选择表面进行了仿真,研究了线宽、周期长度、结构片厚度以及垫片厚度对频率选择表面的频率响应特性的影响。采用UV-LIGA技术对118 GHz频率选择表面进行了加工制造,并对其样品进行测试。SEM结果显示,样品的侧壁陡直性良好,结构尺寸精度高,其最大误差为±2μm。样品的频率响应特性测试结果表明,在118 GHz和89 GHz处的插入损耗分别为-0.24 dB和-13.7 dB,两者皆符合预定指标。这表明UV-LIGA技术在加工频率选择表面具有优越性。Aimed at the applications of the future space millimeter/submillimeter wave quasi-optical technology,the fabrication technology of the frequency selective surface（FSS）for the core device was investigated.The 118 GHz frequency selective surface was simulated by the CST MWS software.Besides,the effects of the line wide,period length,structure thickness and shim thickness on the frequency response characteristic of the frequency selective surface were studied.Then the 118 GHz frequency selective surface was manufactured by the UV-LIGA technology,and the sample was measured.The SEM results show that the side wall of the sample is of good steepness and the accuracy of the structure size is excellent,and the maximum error is±2μm.The test results of the frequency response characteristic for the sample show that the insertion losses at 118 GHz and89 GHz are-0.24 dB and-13.7 dB respectively,both satisfying the predefined requirements,thus the UV-LIGA technique is an optimum choice for the fabrication of the frequency selective surface.

关 键 词：频率选择表面(FSS) UV-LIGA技术 毫米波 亚毫米波 CST MWS软件 

分 类 号：TH703[机械工程—仪器科学与技术]