微电容超声传感器的设计与测试  

Design and Test of Capacitance Micro-machined Ultrasonic Transducer

作　　者：穆林枫 张文栋[1,2] 何常德[1,2] 张睿[1] 宋金龙[1] 薛晨阳[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学测试技术重点实验室,山西太原030051

出　　处：《仪表技术与传感器》2015年第8期1-3,6,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(61127008)

摘　　要：针对现有微电容超声传感器(CMUT)寄生电容大的问题,采用绝缘技术将振动薄膜与上电极金属完全隔离的方法,避免了掺杂效应的发生,从而减小了寄生电容。文中以电容变化率为主线,分别对微传感器和跨阻检测电路的电容变化率进行了计算和仿真,建立了传感器与电路检测的通道,并通过水下测试系统的搭建,对其进行实验验证。测试结果表明,实际输出电压的值为0.8 V,与理论计算值0.61 V相近,从而验证了CMUT的可用性及其测试系统的可行性。Due to the problem of higher parasitic of Capacitance Micro-machined Ultrasonic Transducer （ CMUT）,isolation technology was adopted to apart the vibrating membrane from top electrode,which avoided the effect of doping.The capacitance change rate was the main line of the paper,the calculation and simulation of micro transducer and detection circuit were presented, which built the road between micro transducer and detection circuit.Test system underwater was also conducted.The test results show that the actual output voltage is 0.8 V,and the theory value is 0.61 V,which demonstrates the applicability of CMUT and the feasibility of test system.

关 键 词：微电容超声传感器 寄生电容 电容变化率 跨阻检测电路 系统测试 

分 类 号：TN552[电子电信]