SIW交指带通滤波器的设计与仿真  

Design and Simulation of SIW-Interdigital Band-Pass Filters

作　　者：翟琼华 欧毅[2] 薛晨阳[1] 李志刚[2] 欧文[2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中国科学院微电子研究所集成电路先导工艺研发中心,北京100029

出　　处：《传感技术学报》2015年第9期1379-1383,共5页Chinese Journal of Sensors and Actuators

基　　金：基于两种非线性理论的新型MEMS振动能量收集芯片研究项目(61274119);应用于太赫兹成像的左手材料焦平面阵列研究项目(61306141)

摘　　要：介绍了一种双层SIW带通滤波器,两层之间采用交指结构实现谐振,输入输出采用共面波导形式。所设计的毫米波滤波器芯片尺寸仅有7 mm×3.5 mm×0.8 mm,使用三维高频电磁仿真软件对该结构进行仿真和优化,结果表明滤波性能符合设计要求:中心频率10.6 GHz、带宽2.5 GHz、带内插损2 d B。最后阐明了基于MEMS技术的该滤波器的工艺制作流程。A double-layer SIW band-pass filter has been introduced, in which the interdigital strip-lines structure was utilized to achieve resonant and the CPW coplanar waveguide was used as the input and output lines. The chip size of the millimeter-wave filter designed is as small as 7 mm×3.5 mm×0.8 mm. Then the filter was simulated and optimized by using a 3D electro-magnetic field analysis software. The simulation results show that the central fre- quency, bandwidth, and insertion loss of the designed filter respectively are 10.6 GHz, 2.5 GHz and 2 dB, which ful- ly meet the design aims. Finally, the fabrication process of the MEMS-based filter was presented.

关 键 词：带通滤波器 基片集成波导 交指型 抽头式 MEMS 

分 类 号：TN603.5[电子电信—电路与系统]