基于高分子聚合物毫米波滤波器快速制造技术  

Rapid Replication Technique of the Millimeter Wave Filter with Polymers

作　　者：崔建利[1,2] 段俊萍[1,2] 赵龙[1,2] 张斌珍[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2015年第10期654-659,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61401405;51475438);山西省基础研究项目(2014011021-4)

摘　　要：利用UV-LIGA技术制作毫米波腔体滤波器SU-8主模结构,通过聚二甲基硅氧烷(PDMS)对所制作的SU-8主模结构进行一次复制,得到多个相同的负模结构,将负模结构浸泡在羟丙基甲基纤维素(HPMC)溶液中进行表面防粘处理。处理后,使用PDMS-PDMS软光刻技术和NOA73紫外固化技术进行二次复制,得到PDMS和NOA73材料的毫米波腔体滤波器。对快速复制出的滤波器的表面形貌、结构尺寸进行观测,对其电磁性能(中心频率、带宽、插损和回波损耗)进行测试。结果显示,该方法制备出的毫米波滤波器具有较好的电磁性能。采用该方法制作的毫米波腔体滤波器具有生产周期短、成本低、效率高和结构可靠的特点。The SU-8 master mold of the millimeter wave cavity filter was fabricated by UV-LIGA technology.Many of the same negative molds were obtained through replicating the fabricated SU-8 master mold with the polydimethylsiloxane（PDMS）.The surface anti-sticking treatment of the negative molds was carried out by wetting its surface with the hydroxypropylmethylcellulose（HPMC）solution.After the treatment,the second replication was carried out by the PDMS-PDMS soft lithography and NOA73 UV curing technology,and the millimeter wave cavity filter with PDMS and NOA73 materials was obtained.The surface topography and structure size of the rapid replicate filter were observed,and its electromagnetic performances（center frequency,bandwidth,insertion loss and return loss）were tested.The results show that the fabricated millimeter wave cavity filter has better electromagnetic performance,and the advantages of short production cycle,low cost,high efficiency and reliable structure.

关 键 词：毫米波 聚二甲基硅氧烷(PDMS) NOA73 电磁性能 软光刻 

分 类 号：TH703[机械工程—仪器科学与技术] TN713[机械工程—精密仪器及机械]